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1. WO2020118125 - SYSTÈME D'INSPECTION ET DE MÉTROLOGIE À COUPLAGE LÂCHE POUR SURVEILLANCE DE PROCESSUS DE PRODUCTION DE GRAND VOLUME


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INTERNATIONAL SEARCH REPORT (ISR)
Part 1:  1  2  3  4  5  6          Part 2:  A  B  C  D  E 
International application No. Applicant's or agent's file reference
PCT/US2019/064805 P5424-PCT
International filing date (day/month/year) (Earliest) Priority Date (day/month/year)
06 December 2019 06 December 2018
Applicant
KLA CORPORATION
FOR FURTHER ACTION: See Form PCT/ISA/220 as well as, where applicable, item 5 below.
This international search report has been prepared by this International Searching Authority and is transmitted to the applicant according to Article 18. A copy is being transmitted to the International Bureau.
It is also accompanied by a copy of each prior art document cited in this report.
1. Basis of the report
a. With regard to the language, the international search was carried out on the basis of:
the international application in the language in which it was filed.
a translation of the international application into                                          which is the language of a translation furnished for the purposes of international search (Rules 12.3(a) and 23.1(b)).
b.
This international search report has been established taking into account the rectification of an obvious mistake authorized by or notified to this Authority under Rule 91 (Rule 43.6bis(a)).
c.
With regard to any nucleotide and/or amino acid sequence disclosed in the international application, the international search was carried out on the basis of a sequence listing filed or furnished:
2. Certain claims were found unsearchable
3. Unity of invention is lacking
4. Title of the invention
The text is approved as submitted by the applicant.
The text has been established by this Authority to read as follows:
5. Abstract
The text is approved as submitted by the applicant.
The text has been established, according to Rule 38.2, by this Authority as it appears in Box No. IV. The applicant may, within one month from the date of mailing of this international search report, submit comments to this Authority.
6. Drawings
a.
The figure of the drawings to be published with the abstract is Figure No.     1    
as suggested by the applicant.
as selected by this Authority, because the applicant failed to suggest a figure.
as selected by this Authority, because this figure better characterizes the invention.
b.
none of the figures is to be published with the abstract.

A. CLASSIFICATION OF SUBJECT MATTER

     G01N 21/59 (2006.01)i; H01L 21/66 (2006.01)i; G01B 11/02 (2006.01)i
According to International Patent Classification (IPC) or to both national classification and IPC

B. FIELDS SEARCHED

Minimum documentation searched (classification system followed by classification symbols):
Documentation searched other than minimum documentation to the extent that such documents are included in the fields searched:
Korean utility models and applications for utility models
Japanese utility models and applications for utility models
Electronic data base consulted during the international search (name of data base and, where practicable, search terms used):
eKOMPASS(KIPO internal) & Keywords:metrology, combined, geometric, material and HAR structure

C. DOCUMENTS CONSIDERED TO BE RELEVANT

Category* Citation of document, with indication, where appropriate, of the relevant passages Relevant to claim No.
(1)
X
US 2015-0032398 A1 (KLA-TENCOR CORPORATION) 29 January 2015 paragraphs [0030]-[0036], [0046]-[0047], [0067], [0083], [0087] and figure 2
1,4,14,16-20,23,33
Y
2,3,13,15,21,22,32
A
5-12,24-31
(2)
Y
US 2017-0205342 A1 (KLA-TENCOR CORPORATION) 20 July 2017 paragraphs [0006], [0032]
2,3,13,15,21,22,32
(3)
A
US 2016-0223476 A1 (ASML NETHERLANDS B.V.) 04 August 2016 paragraphs [0005]-[0029]
1-33
(4)
A
US 2012-0275568 A1 (MAZOR et al.) 01 November 2012 abstract and figure 1
1-33
(5)
A
US 7478019 B2 (ZANGOOIE et al.) 13 January 2009 claim 1 and figure 3
1-33
*
Special categories of cited documents:
"A"
document defining the general state of the art which is not considered to be of particular relevance
"D"
document cited by the applicant in the international application
"E"
earlier application or patent but published on or after the international filing date
"L"
document which may throw doubts on priority claim(s) or which is cited to establish the publication date of another citation or other special reason (as specified)
"O"
document referring to an oral disclosure, use, exhibition or other means
"P"
document published prior to the international filing date but later than the priority date claimed
"T"
later document published after the international filing date or priority date and not in conflict with the application but cited to understand the principle or theory underlying the invention
"X"
document of particular relevance; the claimed invention cannot be considered novel or cannot be considered to involve an inventive step when the document is taken alone
"Y"
document of particular relevance; the claimed invention cannot be considered to involve an inventive step when the document is combined with one or more other such documents, such combination being obvious to a person skilled in the art
"&"
document member of the same patent family

D. INFORMATION ON PATENT FAMILY MEMBERS

Patent document cited in search report Publication date
(day/month/year)
Patent family member(s) Publication date
(day/month/year)
US 2015-0032398 A1
29 January 2015
IL 265029 A
IL 243474 B
IL 243474 A
KR 10-2046216 B1
KR 10-2019-0128262 A
KR 10-2080203 B1
KR 10-2016-0030267 A
TW 201510477 A
US 9535018 B2
WO 2015-006234 A1
30 April 2019
28 February 2019
28 February 2019
18 November 2019
15 November 2019
24 February 2020
16 March 2016
16 March 2015
03 January 2017
15 January 2015
US 2017-0205342 A1
20 July 2017
CN 108463877 A
DE 112017000384 T5
JP 2019-503486 A
KR 10-2018-0095102 A
TW 201734417 A
US 9921152 B2
WO 2017-123467 A1
28 August 2018
27 September 2018
07 February 2019
24 August 2018
01 October 2017
20 March 2018
20 July 2017
US 2016-0223476 A1
04 August 2016
NL 2016080 A
TW I603054 B
TW 201629431 A
US 10222709 B2
WO 2016-124345 A1
29 September 2016
21 October 2017
16 August 2016
05 March 2019
11 August 2016
US 2012-0275568 A1
01 November 2012
US 8565379 B2
22 October 2013
US 7478019 B2
13 January 2009
US 2006-167651 A1
27 July 2006
Name and mailing address of the ISA/:
Korean Intellectual Property Office
189 Cheongsa-ro, Seo-gu, Daejeon Metropolitan City, 302-701
Republic of Korea
Facsimile No. +82-42-481-8578
Date of the actual completion of the international search:
25 March 2020
Date of mailing of the international search report:
25 March 2020
Authorized officer:
LEE, Hun Gil
Telephone No. +82-42-481-8525
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