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1. WO2020112237 - PROCÉDÉS DE FORMATION DE MOTIFS SUR DES COUCHES MÉTALLIQUES


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INTERNATIONAL SEARCH REPORT (ISR)
Part 1:  1  2  3  4  5  6          Part 2:  A  B  C  D  E 
International application No. Applicant's or agent's file reference
PCT/US2019/053778 44016053WO01
International filing date (day/month/year) (Earliest) Priority Date (day/month/year)
30 September 2019 30 November 2018
Applicant
APPLIED MATERIALS, INC.
FOR FURTHER ACTION: See Form PCT/ISA/220 as well as, where applicable, item 5 below.
This international search report has been prepared by this International Searching Authority and is transmitted to the applicant according to Article 18. A copy is being transmitted to the International Bureau.
It is also accompanied by a copy of each prior art document cited in this report.
1. Basis of the report
a. With regard to the language, the international search was carried out on the basis of:
the international application in the language in which it was filed.
a translation of the international application into                                          which is the language of a translation furnished for the purposes of international search (Rules 12.3(a) and 23.1(b)).
b.
This international search report has been established taking into account the rectification of an obvious mistake authorized by or notified to this Authority under Rule 91 (Rule 43.6bis(a)).
c.
With regard to any nucleotide and/or amino acid sequence disclosed in the international application, the international search was carried out on the basis of a sequence listing:
2. Certain claims were found unsearchable
3. Unity of invention is lacking
4. Title of the invention
The text is approved as submitted by the applicant.
The text has been established by this Authority to read as follows:
5. Abstract
The text is approved as submitted by the applicant.
The text has been established, according to Rule 38.2, by this Authority as it appears in Box No. IV. The applicant may, within one month from the date of mailing of this international search report, submit comments to this Authority.
6. Drawings
a.
The figure of the drawings to be published with the abstract is Figure No.     1    
as suggested by the applicant.
as selected by this Authority, because the applicant failed to suggest a figure.
as selected by this Authority, because this figure better characterizes the invention.
b.
none of the figures is to be published with the abstract.

A. CLASSIFICATION OF SUBJECT MATTER

     H01L 21/768 (2006.01)i; H01L 21/02 (2006.01)i; H01L 21/3065 (2006.01)i; H01L 21/306 (2006.01)i
According to International Patent Classification (IPC) or to both national classification and IPC

B. FIELDS SEARCHED

Minimum documentation searched (classification system followed by classification symbols):
Documentation searched other than minimum documentation to the extent that such documents are included in the fields searched:
Korean utility models and applications for utility models
Japanese utility models and applications for utility models
Electronic data base consulted during the international search (name of data base and, where practicable, search terms used):
eKOMPASS(KIPO internal) & keywords: molybdenum, remove, interconnect, high pressure

C. DOCUMENTS CONSIDERED TO BE RELEVANT

Category* Citation of document, with indication, where appropriate, of the relevant passages Relevant to claim No.
(1)
Y
US 2014-0273490 A1 (APPLIED MATERIALS, INC.) 18 September 2014 See paragraphs [0054]-[0062] and figures 4-5B.
1-8
A
9-15
(2)
Y
US 5972235 A (KRISTIN BRIGHAM et al.) 26 October 1999 See claims 1, 13.
1-8
(3)
Y
US 5350484 A (DONALD S. GARDNER et al.) 27 September 1994 See column 5, lines 17-54, column 8, lines 13-18 and figures 3A-3D.
8
(4)
A
US 2013-0059444 A1 (YAN SHAO et al.) 07 March 2013 See paragraphs [0040]-[0076], [0112]-[0113] and figures 5, 8.
1-15
(5)
A
US 2013-0335383 A1 (TERUO SASAGAWA) 19 December 2013 See claim 1 and figures 6A-7.
1-15
*
Special categories of cited documents:
"A"
document defining the general state of the art which is not considered to be of particular relevance
"D"
document cited by the applicant in the international application
"E"
earlier application or patent but published on or after the international filing date
"L"
document which may throw doubts on priority claim(s) or which is cited to establish the publication date of another citation or other special reason (as specified)
"O"
document referring to an oral disclosure, use, exhibition or other means
"P"
document published prior to the international filing date but later than the priority date claimed
"T"
later document published after the international filing date or priority date and not in conflict with the application but cited to understand the principle or theory underlying the invention
"X"
document of particular relevance; the claimed invention cannot be considered novel or cannot be considered to involve an inventive step when the document is taken alone
"Y"
document of particular relevance; the claimed invention cannot be considered to involve an inventive step when the document is combined with one or more other such documents, such combination being obvious to a person skilled in the art
"&"
document member of the same patent family

D. INFORMATION ON PATENT FAMILY MEMBERS

Patent document cited in search report Publication date
(day/month/year)
Patent family member(s) Publication date
(day/month/year)
US 2014-0273490 A1
18 September 2014
US 2016-0329210 A1
US 9425062 B2
US 10199224 B2
10 November 2016
23 August 2016
05 February 2019
US 5972235 A
26 October 1999
EP 0972428 A1
EP 0972428 A4
JP 2000-512085 A
KR 10-0385638 B1
KR 10-2000-0075467 A
US 6582617 B1
WO 98-38837 A1
WO 00-67281 A1
19 January 2000
18 May 2005
12 September 2000
27 May 2003
15 December 2000
24 June 2003
03 September 1998
09 November 2000
US 5350484 A
27 September 1994
GB 2270417 A
JP 07-302798 A
KR 10-0273921 B1
09 March 1994
14 November 1995
15 December 2000
US 2013-0059444 A1
07 March 2013
US 8557710 B2
15 October 2013
US 2013-0335383 A1
19 December 2013
None
Name and mailing address of the ISA/:
Korean Intellectual Property Office
189 Cheongsa-ro, Seo-gu, Daejeon Metropolitan City, 302-701
Republic of Korea
Facsimile No. +82-42-481-8578
Date of the actual completion of the international search:
17 January 2020
Date of mailing of the international search report:
17 January 2020
Authorized officer:
JANG, Gijeong
Telephone No. +82-42-481-8364
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