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1. WO2012021271 - SYSTÈME D'ACQUISITION VISUELLE À GRANDE VITESSE, ET PROCÉDÉ DE VISUALISATION SÉLECTIVE DE CARACTÉRISTIQUES D'OBJET

Note: Texte fondé sur des processus automatiques de reconnaissance optique de caractères. Seule la version PDF a une valeur juridique

[ EN ]

WHAT IS CLAIMED IS:

1 . An optical apparatus for creating an image of an object comprising non-transparent material, the apparatus comprising:

a. an illuminating light source producing an illuminating light having a controlled angular spectrum;

b. an infinity corrected objective directing the illuminating light on the object and collecting light from the object;

c. an illumination optical path delivering the illuminating light from the illuminating light source to the infinity-corrected objective;

d. a relay optics disposed within the illumination optical path for introducing a predetermined tilt angle for rays of the illuminating light entering the infinity corrected objective;

e. an image sensor for creating the image of the object; and

f. an imaging optical path for delivering the collected light from the infinity-corrected objective to the image sensor,

wherein the illuminating light source, the infinity corrected objective and the relay optics are arranged to at least partially prevent stray light rays, rays, scattered by the surface or interface of the non-transparent material and light rays, perturbed by inhomogeneities of the non- transparent material, from entering the imaging optical path.

2. The optical apparatus of claim 1 , further comprising:

i. a removable block disposed within the imaging optical path optically downstream of the infinity corrected objective; and

ii. an adjustable iris disposed within the imaging optical path optically downstream of the infinity corrected objective,

wherein the relay optics, the infinity corrected objective, the removable block and the adjustable iris are arranged to at least partially prevent light rays directly reflected by the surface or interface of the non- transparent material of the object from reaching the sensor or forming the image within a sensor plane.

3. The optical apparatus of claim 1 , wherein the relay optics is configured to perform spatial modulation of intensity of the illuminating light.

4. The optical apparatus of claim 1 , further comprising dephasing optics comprising a ½ wave plate; a non-polarization maintaining optical element and a polarizing beam splitter, the dephasing optics operable to decouple polarization of the illuminating light to suppress or reduce speckle pattern.

5. The optical apparatus of claim 1 , further comprising homogenizing

optics operable to homogenize distribution of intensity of the illuminating light.

6. The optical apparatus of claim 1 , further comprising a second illuminating light source and a switch operable to selectively couple the illuminating light source and the second illuminating light source to the relay optics.

7. The optical apparatus of claim 1 , wherein the illuminating light source further comprises an optical fiber or guide operable to deliver the illuminating light to the relay optics and wherein the angular spectrum of the illuminating light is controlled by choosing a numerical aperture of the optical fiber or guide and using an adjustable iris vignetting output of the optical fiber or guide and an adjustable distance between the optical fiber or guide and the relay optics.

8. The optical apparatus of claim 7, wherein the tilt angle is determined at least by the size of an emitting aperture of the optical fiber or guide, the distance between the optical fiber or guide and the relay optics, and the divergence of the illuminating light coupled to the relay optics.

9. The optical apparatus of claim 5, further comprising an illumination controller operable to vary an emitting aperture of the optical fiber and the distance between the optical fiber or guide and relay optics.

10. The optical apparatus of claim 5, further comprising an imaging optics controller configured to control the size of the adjustable iris vignetting output and the position of the removable block.

1 1 . The optical apparatus of claim 1 , wherein the imaging optical path

comprises a tube lens for creating the image of the object in the image sensor, the tube lens being disposed optically downstream of the removable block and the adjustable iris.

12. The optical apparatus of claim 1 , further comprising filtering optics, wherein the illuminating light source, the infinity corrected objective, the filtering optics, and the relay optics are arranged to provide a predetermined angle of incidence of the illuminating light on the object, wherein the predetermined angle of incidence is selected such as to prevent the stray light and prevent or reduce an amount of light scattered from a surface or an interface of the non-transparent material from entering the imaging optical path, and to create conditions for prevention or reduction of an amount of light directly reflected by the surface or the interface of the non-transparent material from reaching the image sensor or prevention of the directly reflected light from forming the image within the image sensor plane.

13. The optical apparatus of claim 1 , further comprising a spatial beam intensity modulator disposed within the relay optics for conditioning the illuminating light.

14. The optical apparatus of claim 1 1 , wherein the spatial beam intensity modulator comprises a light diffuser, an optical fiber or guide disposed within the illumination optical path and operable to homogenize spatial and angular distribution of the intensity of the illuminating light.

15. The optical apparatus of claim 1 , further comprising an optical fiber or light guide having an adjustable iris vignetting output of the fiber and operable to control a divergence and a size of an emitting area and an angular spectrum distribution of the illuminating light.

16. The optical apparatus of claim 1 , wherein the illuminating light source is a monochromatic light source producing substantially monochromatic illuminating light and wherein the optical

apparatus further comprises a color inspection subsystem comprising a white illuminating light source producing a white illuminating light and a switching module, wherein the switching module, the imaging optical path and the image sensor are configured to create images of the object illuminated alternatively by the monochromatic light and the white light.

17. The optical apparatus of claim 14, further comprising a switch

configured to alternatively couple the monochromatic illuminating light source and the white illuminating light source to the illumination optical path.

18. The optical apparatus of claim 1 , wherein a wavelength of the

illuminating light is selected based on optical properties of the non-transparent material covering a structure of interest on the object.

19. The optical apparatus of claim 1 , wherein each point on a light-emitting surface of the illuminating light source emits light in a substantially one direction or narrow solid angle around that direction.

20. The optical apparatus of claim 1 , further comprising a set of infinity corrected objective lenses and a switching module, wherein the switching module is operable to selectively place the required infinity corrected objective lens into the imaging optical path and wherein the infinity corrected objective lenses are characterized by different magnifications and design to work in different spectral ranges.

The optical apparatus of claim 1 , further comprising multiple

illuminating light sources, an illumination controller operable to control parameters of the multiple illuminating sources, the parameters comprising at least one of: intensity of emission, time domain duty cycle, synchronization mode or triggering mode.

22. The optical apparatus of claim 1 , wherein the illuminating light source comprises at least one of a laser or an LED.

The optical apparatus of claim 1 , wherein the illuminating light source comprises a diode pumped solid state laser operating in nanosecond mode, the illuminating light source being configured to additionally perform material processing.

24. The optical apparatus of claim 1 , wherein the image sensor comprises a CCD imaging sensor.

25. The optical apparatus of claim 1 , wherein the illuminating light

produced by the illuminating light source is characterized by a wavelength at which a material of at least a portion of the object is not transparent.

26. An optical apparatus for creating an image of an object comprising an object feature, the apparatus comprising:

an illuminating light source having an emitting aperture and producing an illuminating light having a controlled angular spectrum;

an infinity corrected objective directing the illuminating light on the object and collecting light from the object;

an illumination optical path delivering the illuminating light from the illuminating light source to the infinity-corrected objective;

a relay optics disposed within the illumination optical path for introducing a predetermined tilt angle for rays of the illuminating light entering the infinity corrected objective;

an image sensor for creating the image of the object; and

f. an imaging optical path for delivering the collected light from the infinity-corrected objective to the image sensor,

wherein the emitting aperture of the illuminating light source is configured to completely fill the entrance pupil of the infinity corrected objective and the relay optics is configured to provide focusing of the illuminating light on the surface of the object or building an image of the illuminating light source at an object plane.

The optical apparatus of claim 26, wherein the illuminating light source further comprises an optical fiber or guide operable to deliver the illuminating light to the relay optics and wherein the angular spectrum of the illuminating light is controlled by choosing a numerical aperture of the optical fiber or guide and using an adjustable iris vignetting output of the optical fiber or guide and an adjustable distance between the optical fiber or guide and the relay optics and wherein the adjustable iris vignetting output of the optical fiber or guide is opened and the adjustable distance between the optical fiber or guide and the relay optics is set to achieve focusing of the illuminating light on the object or building the image of the illuminating light source at the object plane.

28. An optical apparatus for creating an image of an object comprising an object feature, the apparatus comprising:

a. an illuminating light source having an emitting aperture and producing an illuminating light having a controlled angular spectrum;

b. an infinity corrected objective directing the illuminating light on the object and collecting light from the object;

c. an illumination optical path delivering the illuminating light from the illuminating light source to the infinity-corrected objective;

d. a relay optics disposed within the illumination optical path for introducing a predetermined tilt angle for rays of the illuminating light entering the infinity corrected objective;

e. an image sensor for creating the image of the object; and

f. an imaging optical path for delivering the collected light from the infinity-corrected objective to the image sensor,

wherein the emitting aperture of the illuminating light source is substantially reduced and the relay optics is configured to provide a strongly divergent or a strongly convergent illuminating light incident on the object.

A method for creating an image of an object comprising non- transparent material, the method comprising:

a. producing, using an illuminating light source, an illuminating light having a controlled angular spectrum;

b. directing, using an infinity corrected objective, the illuminating light on the object and collecting light from the object;

c. delivering, using an illumination optical path, the illuminating light from the illuminating light source to the infinity-corrected objective;

d. introducing, using a relay optics disposed within the illumination optical path, a predetermined tilt angle for rays of the

illuminating light entering the infinity corrected objective;

e. creating, using an image sensor, the image of the object; and

f. delivering, using an imaging optical path, the collected light from the infinity-corrected objective to the image sensor,

wherein the illuminating light source, the infinity corrected objective and the relay optics are used to at least partially prevent stray light rays, rays, scattered by the surface or interface of the non-transparent material and light rays, perturbed by inhomogeneities of the non-transparent material, from entering the imaging optical path.

A method for creating an image of an object comprising an object feature, the method comprising:

a. producing, using an illuminating light source having an emitting aperture, an illuminating light having a controlled angular spectrum;

b. directing, using an infinity corrected objective, the illuminating light on the object and collecting light from the object;

c. delivering, using an illumination optical path, the illuminating light from the illuminating light source to the infinity-corrected objective;

d. introducing, using a relay optics disposed within the illumination optical path, a predetermined tilt angle for rays of the illuminating light entering the infinity corrected objective;

e. creating, using an image sensor, the image of the object; and

f. delivering, using an imaging optical path, the collected light from the infinity-corrected objective to the image sensor,

wherein the emitting aperture of the illuminating light source is used to completely fill the entrance pupil of the infinity corrected objective and the relay optics is used to provide focusing of the illuminating light on the surface of the object or building an image of the illuminating light source at an object plane.

A method for creating an image of an object comprising an object feature, the method comprising:

a. producing, using an illuminating light source having an emitting aperture, an illuminating light having a controlled angular spectrum;

b. directing, using an infinity corrected objective, the illuminating light on the object and collecting light from the object;

c. delivering, using an illumination optical path, the illuminating light from the illuminating light source to the infinity-corrected objective;

d. introducing, using a relay optics disposed within the illumination optical path, a predetermined tilt angle for rays of the illuminating light entering the infinity corrected objective;

e. creating, using an image sensor, the image of the object; and

f. delivering, using an imaging optical path, the collected light from the infinity-corrected objective to the image sensor,

wherein the emitting aperture of the illuminating light source is substantially reduced and the relay optics is used to provide a strongly divergent or a strongly convergent illuminating light incident on the object.