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1. WO2007146031 - APPAREIL D'IMPRESSION LITHOGRAPHIQUE ET PROCÉDÉS

Numéro de publication WO/2007/146031
Date de publication 21.12.2007
N° de la demande internationale PCT/US2007/013374
Date du dépôt international 06.06.2007
CIB
G03F 7/00 2006.01
GPHYSIQUE
03PHOTOGRAPHIE; CINÉMATOGRAPHIE; TECHNIQUES ANALOGUES UTILISANT D'AUTRES ONDES QUE DES ONDES OPTIQUES; ÉLECTROGRAPHIE; HOLOGRAPHIE
FPRODUCTION PAR VOIE PHOTOMÉCANIQUE DE SURFACES TEXTURÉES, p.ex. POUR L'IMPRESSION, POUR LE TRAITEMENT DE DISPOSITIFS SEMI-CONDUCTEURS; MATÉRIAUX À CET EFFET; ORIGINAUX À CET EFFET; APPAREILLAGES SPÉCIALEMENT ADAPTÉS À CET EFFET
7Production par voie photomécanique, p.ex. photolithographique, de surfaces texturées, p.ex. surfaces imprimées; Matériaux à cet effet, p.ex. comportant des photoréserves; Appareillages spécialement adaptés à cet effet
CPC
B29C 2035/0827
BPERFORMING OPERATIONS; TRANSPORTING
29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
35Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
02Heating or curing, e.g. crosslinking or vulcanizing ; during moulding, e.g. in a mould
08by wave energy or particle radiation
0805using electromagnetic radiation
0827using UV radiation
B29C 2059/023
BPERFORMING OPERATIONS; TRANSPORTING
29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
59Surface shaping ; of articles; , e.g. embossing; Apparatus therefor
02by mechanical means, e.g. pressing
022characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
023Microembossing
B29C 37/005
BPERFORMING OPERATIONS; TRANSPORTING
29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
37Component parts, details, accessories or auxiliary operations, not covered by group B29C33/00 or B29C35/00
005Compensating volume or shape change during moulding, in general
B82Y 10/00
BPERFORMING OPERATIONS; TRANSPORTING
82NANOTECHNOLOGY
YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
10Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
B82Y 40/00
BPERFORMING OPERATIONS; TRANSPORTING
82NANOTECHNOLOGY
YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
40Manufacture or treatment of nanostructures
G03F 7/0002
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR;
7Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
0002Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
Déposants
  • HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. [US/US]; 20555 S. H. 249 Houston, TX 77070, US (AllExceptUS)
  • WU, Wei [CN/US]; US (UsOnly)
  • WANG, Shih-Yuan [US/US]; US (UsOnly)
  • YU, Zhaoning [CN/US]; US (UsOnly)
  • WILLIAMS, R. Stanley, [US/US]; US (UsOnly)
Inventeurs
  • WU, Wei; US
  • WANG, Shih-Yuan; US
  • YU, Zhaoning; US
  • WILLIAMS, R. Stanley,; US
Mandataires
  • COLLINS, David, W.; Hewlett-Packard Company Intellectual Property Administration P O Box 272400 M/S 35 Fort Collins, CO 80527-2400, US
Données relatives à la priorité
11/451,99313.06.2006US
Langue de publication anglais (EN)
Langue de dépôt anglais (EN)
États désignés
Titre
(EN) IMPRINT LITHOGRAPHY APPARATUS AND METHODS
(FR) APPAREIL D'IMPRESSION LITHOGRAPHIQUE ET PROCÉDÉS
Abrégé
(EN)
An apparatus for forming a pattern in a curable material carried on a substrate (108) having one or more components with coefficients of thermal expansion that are substantially equal to the coefficient of thermal expansion of the substrate (108).
(FR)
La présente invention concerne un appareil pour former un motif dans un matériau durcissable réalisé sur un substrat (108) ayant un composant ou plus avec des coefficients d'expansion thermique qui sont sensiblement égaux au coefficient d'expansion thermique du substrat (108).
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