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1. WO2004102256 - PROCEDES ET APPAREILS D'HOMOGENEISATION DE LUMIERE

Numéro de publication WO/2004/102256
Date de publication 25.11.2004
N° de la demande internationale PCT/US2004/014239
Date du dépôt international 05.05.2004
CIB
G02B 27/09 2006.01
GPHYSIQUE
02OPTIQUE
BÉLÉMENTS, SYSTÈMES OU APPAREILS OPTIQUES
27Systèmes ou appareils optiques non prévus dans aucun des groupes G02B1/-G02B26/117
09Mise en forme du faisceau, p.ex. changement de la section transversale, non prévue ailleurs
CPC
G02B 27/09
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
27Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
G02B 27/0927
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
27Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
0927Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
G02B 27/0961
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
27Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
0938Using specific optical elements
095Refractive optical elements
0955Lenses
0961Lens arrays
G02B 27/0966
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
27Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
0938Using specific optical elements
095Refractive optical elements
0955Lenses
0966Cylindrical lenses
G02B 27/0983
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
27Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
0938Using specific optical elements
0977Reflective elements
0983being curved
G03F 7/70066
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR;
7Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
70Exposure apparatus for microlithography
70058Mask illumination systems
70066Size and form of the illuminated area in the mask plane, e.g. REMA
Déposants
  • RESONETICS, INC. [US]/[US] (AllExceptUS)
  • BROUDE, Sergey, V. [US]/[US] (UsOnly)
  • HOLBROOK, David, S. [US]/[US] (UsOnly)
  • MILLER, Pascal [BE]/[US] (UsOnly)
Inventeurs
  • BROUDE, Sergey, V.
  • HOLBROOK, David, S.
  • MILLER, Pascal
Mandataires
  • HOPKINS, Brian, P.
Données relatives à la priorité
10/839,02604.05.2004US
60/468,51107.05.2003US
Langue de publication anglais (EN)
Langue de dépôt anglais (EN)
États désignés
Titre
(EN) METHODS AND APPARATUSES FOR HOMOGENIZING LIGHT
(FR) PROCEDES ET APPAREILS D'HOMOGENEISATION DE LUMIERE
Abrégé
(EN)
Embodiments of the present invention are directed to an illuminating optical device for forming a field of illumination. The optical device includes a first on-dimensional homogenizer positioned to homogenize a first dimension/axis of the field of illumination and a second one-dimensional homogenizer positioned to homogenize a second dimension/axis of the field of illumination.
(FR)
Dans certains modes de réalisation, l'invention concerne un dispositif optique d'éclairage permettant de former un champ d'éclairage. Le dispositif optique comprend un premier homogénéisateur unidimensionnel positionné de manière à homogénéiser une première dimension/un premier axe du champ d'éclairage et un second homogénéisateur unidimensionnel positionné de manière à homogénéiser une seconde dimension/un second axe du champ d'éclairage.
Également publié en tant que
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