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1. WO1999010257 - MANIPULATEUR DE PLAQUETTES POUR OUTIL MULTIPOSTE

Numéro de publication WO/1999/010257
Date de publication 04.03.1999
N° de la demande internationale PCT/US1998/017806
Date du dépôt international 27.08.1998
Demande présentée en vertu du Chapitre 2 25.03.1999
CIB
H01L 21/677 2006.1
HÉLECTRICITÉ
01ÉLÉMENTS ÉLECTRIQUES FONDAMENTAUX
LDISPOSITIFS À SEMI-CONDUCTEURS; DISPOSITIFS ÉLECTRIQUES À L'ÉTAT SOLIDE NON PRÉVUS AILLEURS
21Procédés ou appareils spécialement adaptés à la fabrication ou au traitement de dispositifs à semi-conducteurs ou de dispositifs à l'état solide, ou bien de leurs parties constitutives
67Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitement; Appareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
677pour le transport, p.ex. entre différents postes de travail
CPC
B65G 1/06
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
1Storing articles, individually or in orderly arrangement, in warehouses or magazines
02Storage devices
04mechanical
06with means for presenting articles for removal at predetermined position or level
H01L 21/67742
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
677for conveying, e.g. between different workstations
67739into and out of processing chamber
67742Mechanical parts of transfer devices
H01L 21/67745
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
677for conveying, e.g. between different workstations
67739into and out of processing chamber
67745characterized by movements or sequence of movements of transfer devices
H01L 21/67754
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
677for conveying, e.g. between different workstations
67739into and out of processing chamber
67754horizontal transfer of a batch of workpieces
H01L 21/68707
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
683for supporting or gripping
687using mechanical means, e.g. chucks, clamps or pinches
68707the wafers being placed on a robot blade, or gripped by a gripper for conveyance
Y10S 414/141
YSECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
10TECHNICAL SUBJECTS COVERED BY FORMER USPC
STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
414Material or article handling
135Associated with semiconductor wafer handling
141includes means for gripping wafer
Déposants
  • CVC PRODUCTS, INC. [US]/[US]
Inventeurs
  • MOSLEHI, Mehrdad, M.
Mandataires
  • RYAN, Thomas, B.
Données relatives à la priorité
60/057,71528.08.1997US
Langue de publication Anglais (en)
Langue de dépôt anglais (EN)
États désignés
Titre
(EN) WAFER HANDLER FOR MULTI-STATION TOOL
(FR) MANIPULATEUR DE PLAQUETTES POUR OUTIL MULTIPOSTE
Abrégé
(EN) A robotic wafer handler (50) is mounted on a central platform (24) of a cluster tool for transporting wafers between loading and processing stations (12, 14, 16, 18, 20, 22). The wafer handler (50) includes a main arm (52) that is rotatable around a vertical axis, translatable along the vertical axis, and translatable along an horizontal axis that rotates with the main arm (52) around the vertical axis. An auxiliary arm (76) is translatable along the horizontal axis relative to the main arm (52) between extended and retracted positions. In the extended position, an end effector (78) of the auxiliary arm (76) is aligned with an end effector (70) of the main arm (52) for retrieving or replacing wafers with the auxiliary arm (76). In the retracted position, the end effector (78) of the auxiliary arm (76) is withdrawn for retrieving or replacing wafers with the main arm (52).
(FR) Un manipulateur de plaquettes utilisé en robotique (50) est monté sur une plate-forme centrale (24) d'un outil multiposte pour le transport de plaquettes entre des postes de chargement et de traitement (12, 14, 16, 18, 20, 22). Le manipulateur de plaquettes (50) comprend un bras principal (52) qui est entraîné en rotation autour d'un axe vertical, déplaçable le long de l'axe vertical et le long d'un axe horizontal qui tourne avec le bras principal (52) autour de l'axe vertical. Un bras auxiliaire (76) est déplaçable le long de l'axe horizontal, par rapport au bras principal (52), entre des positions allongée et rétractée. En position allongée, un effecteur d'extrémité (78) du bras auxiliaire (76) est aligné avec un effecteur d'extrémité (70) du bras principal (52) pour la récupération ou la remise en place des plaquettes au moyen du bras auxiliaire (76). En position rétractée, l'effecteur d'extrémité (78) du bras auxiliaire (76) est retiré, ce qui permet au bras principal (52) d'effectuer la récupération ou la remise en place des plaquettes.
Dernières données bibliographiques dont dispose le Bureau international