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1. US20130331973 - Integrated controller solution for monitoring and controlling manufacturing equipment

Office
États-Unis d'Amérique
Numéro de la demande 13895978
Date de la demande 16.05.2013
Numéro de publication 20130331973
Date de publication 12.12.2013
Numéro de délivrance 09740182
Date de délivrance 22.08.2017
Type de publication B2
CIB
G05B 15/02
GPHYSIQUE
05COMMANDE; RÉGULATION
BSYSTÈMES DE COMMANDE OU DE RÉGULATION EN GÉNÉRAL; ÉLÉMENTS FONCTIONNELS DE TELS SYSTÈMES; DISPOSITIFS DE CONTRÔLE OU DE TEST DE TELS SYSTÈMES OU ÉLÉMENTS
15Systèmes commandés par un calculateur
02électriques
G05B 23/02
GPHYSIQUE
05COMMANDE; RÉGULATION
BSYSTÈMES DE COMMANDE OU DE RÉGULATION EN GÉNÉRAL; ÉLÉMENTS FONCTIONNELS DE TELS SYSTÈMES; DISPOSITIFS DE CONTRÔLE OU DE TEST DE TELS SYSTÈMES OU ÉLÉMENTS
23Test ou contrôle des systèmes de commande ou de leurs éléments
02Test ou contrôle électrique
CPC
G05B 23/0291
GPHYSICS
05CONTROLLING; REGULATING
BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
23Testing or monitoring of control systems or parts thereof
02Electric testing or monitoring
0205by means of a monitoring system capable of detecting and responding to faults
0259characterized by the response to fault detection
0286Modifications to the monitored process, e.g. stopping operation or adapting control
0291Switching into safety or degraded mode, e.g. protection and supervision after failure
Y02P 90/14
Y02P 90/86
G05B 19/418
GPHYSICS
05CONTROLLING; REGULATING
BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
19Programme-control systems
02electric
418Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
G05B 15/02
GPHYSICS
05CONTROLLING; REGULATING
BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
15Systems controlled by a computer
02electric
Déposants APPLIED MATERIALS, INC.
Inventeurs Daniel O. Clark
Youssef A. Loldj
Shaun W. Crawford
Maxime Cayer
Tony H. Tong
Eric Rieske
Mandataires Moser Taboada
Alan Taboada
Titre
(EN) Integrated controller solution for monitoring and controlling manufacturing equipment
Abrégé
(EN)

Methods and apparatus for controlling manufacturing equipment are provided herein. In some embodiments, a manufacturing system may include an integrated controller having one or more inputs to receive input values corresponding to operating information of at least one of a process tool, a mass flow controller or at least one sub-fab auxiliary system, wherein the integrated controller is configured to receive the input values, determine that an error condition is matched based on the received input values, and control the at least one sub-fab auxiliary system to operate at a fail-safe operating mode responsive to the determined error condition.