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1. US20120325349 - SUBSTRATE ACCOMMODATION DEVICE

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États-Unis d'Amérique
Numéro de la demande 13582079
Date de la demande 21.02.2011
Numéro de publication 20120325349
Date de publication 27.12.2012
Type de publication A1
CIB
F17D 3/00
FMÉCANIQUE; ÉCLAIRAGE; CHAUFFAGE; ARMEMENT; SAUTAGE
17STOCKAGE OU DISTRIBUTION DES GAZ OU DES LIQUIDES
DSYSTÈMES DE CANALISATION; PIPE-LINES
3Dispositions pour la surveillance ou la commande des opérations de fonctionnement
CPC
H01L 21/67359
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
673using specially adapted carriers ; or holders; Fixing the workpieces on such carriers or holders
6735Closed carriers
67359specially adapted for containing masks, reticles or pellicles
H01L 21/67393
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
673using specially adapted carriers ; or holders; Fixing the workpieces on such carriers or holders
6735Closed carriers
67389characterised by atmosphere control
67393characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl
Y10T 137/86035
YSECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
10TECHNICAL SUBJECTS COVERED BY FORMER USPC
TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
137Fluid handling
8593Systems
85978With pump
86035Combined with fluid receiver
Déposants Moriya Tsuyoshi
Inventeurs Moriya Tsuyoshi
Données relatives à la priorité 2010048380 04.03.2010 JP
Titre
(EN) SUBSTRATE ACCOMMODATION DEVICE
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Abrégé
(EN)

A substrate accommodation device can effectively prevent a foreign substance from adhering to a substrate accommodated therein depending on an environment where the substrate accommodation device is used. The substrate accommodation device 100 includes an air supply unit 110 configured to introduce exterior air into the substrate accommodation device 100; an exhaust unit 120 disposed to face the air supply unit 110; a substrate mounting plate 140 provided between the air supply unit 110 and the exhaust unit 120 and provided with holes 142 through which the air supply unit 110 and the exhaust unit 120 communicate with each other; an air supply filter 112 provided at the air supply unit 110; and a fan 122 provided at the air supply unit 110 or the exhaust unit 120. Further, one of a state sensor configured to detect a state within the substrate accommodation device 100, a particle charging device, and a temperature controller or a combination of two or more thereof is detachably provided in a mounting hole 150. (FIG. 2)
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