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1. JP2020201308 - LIGHT DEFLECTOR NAD MANUFACTURING METHOD

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Japon
Numéro de la demande 2019106111
Date de la demande 06.06.2019
Numéro de publication 2020201308
Date de publication 17.12.2020
Type de publication A5
CIB
G02B 26/10
GPHYSIQUE
02OPTIQUE
BÉLÉMENTS, SYSTÈMES OU APPAREILS OPTIQUES
26Dispositifs ou systèmes optiques utilisant des éléments optiques mobiles ou déformables pour commander l'intensité, la couleur, la phase, la polarisation ou la direction de la lumière, p.ex. commutation, ouverture de porte ou modulation
08pour commander la direction de la lumière
10Systèmes de balayage
B81B 3/00
BTECHNIQUES INDUSTRIELLES; TRANSPORTS
81TECHNOLOGIE DES MICROSTRUCTURES
BDISPOSITIFS OU SYSTÈMES À MICROSTRUCTURE, p.ex. DISPOSITIFS MICROMÉCANIQUES
3Dispositifs comportant des éléments flexibles ou déformables, p.ex. comportant des membranes ou des lamelles élastiques
B81C 1/00
BTECHNIQUES INDUSTRIELLES; TRANSPORTS
81TECHNOLOGIE DES MICROSTRUCTURES
CPROCÉDÉS OU APPAREILS SPÉCIALEMENT ADAPTÉS À LA FABRICATION OU AU TRAITEMENT DE DISPOSITIFS OU DE SYSTÈMES À MICROSTRUCTURE
1Fabrication ou traitement de dispositifs ou de systèmes dans ou sur un substrat
G02B 26/08
GPHYSIQUE
02OPTIQUE
BÉLÉMENTS, SYSTÈMES OU APPAREILS OPTIQUES
26Dispositifs ou systèmes optiques utilisant des éléments optiques mobiles ou déformables pour commander l'intensité, la couleur, la phase, la polarisation ou la direction de la lumière, p.ex. commutation, ouverture de porte ou modulation
08pour commander la direction de la lumière
CPC
B81C 1/00
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
1Manufacture or treatment of devices or systems in or on a substrate
B81B 3/00
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
3Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
G02B 26/0858
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
26Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
08for controlling the direction of light
0816by means of one or more reflecting elements
0833the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
0858the reflecting means being moved or deformed by piezoelectric means
G02B 26/105
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
26Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
08for controlling the direction of light
10Scanning systems
105with one or more pivoting mirrors or galvano-mirrors
H02N 2/028
HELECTRICITY
02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
2Electric machines in general using piezo-electric effect, electrostriction or magnetostriction
02producing linear motion, e.g. actuators; Linear positioners ; ; Linear motors
028along multiple or arbitrary translation directions, e.g. XYZ stages
H02N 2/22
HELECTRICITY
02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
2Electric machines in general using piezo-electric effect, electrostriction or magnetostriction
22Methods relating to manufacturing, e.g. assembling, calibration
Déposants STANLEY ELECTRIC CO LTD
スタンレー電気株式会社
Inventeurs AKIYAMA KEITA
秋山　慶太
Mandataires 特許業務法人創成国際特許事務所
Titre
(EN) LIGHT DEFLECTOR NAD MANUFACTURING METHOD
(JA) 光偏向器及び製造方法
front page image
Abrégé
(EN)

PROBLEM TO BE SOLVED: To provide a light deflector capable of suppressing R parts provided at coupling parts of torsion bars 12 from cleaving.

SOLUTION: A light deflector 10 comprises a mirror part 11, a pair of torsion bars 12, an inside piezoelectric actuator 13, and a movable frame part 14. Axial directions of the torsion bars 12 have a crystal azimuth <100>. At coupling edge parts between the torsion bars 12 and the inside piezoelectric actuator 13, R parts 31ab, 31bb are formed to have curved surfaces which are directed to <110> and also hollowed inward. A waviness quantity with respect a roughness curve derived from the curved surface is 600 nm or less.

SELECTED DRAWING: Figure 3

COPYRIGHT: (C)2021,JPO&INPIT


(JA)

【課題】トーションバー１２の結合部に設けられたＲ部の劈開を抑制することができる光偏向器を提供する。
【解決手段】光偏向器１０は、ミラー部１１、１対のトーションバー１２、内側圧電アクチュエータ１３及び可動枠部１４を備える。トーションバー１２の軸方向を結晶方位を＜１００＞としている。トーションバー１２と内側圧電アクチュエータ１３との結合縁部には、Ｒ部３１ａｂ，３１ｂｂが、＜１１０＞に向けられて、かつ内側にへこむ湾曲面で形成されている。該湾曲面から導出される粗さ曲線についてのうねり量は、６００ｎｍ以内にされる
【選択図】図３
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