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PROBLEM TO BE SOLVED: To effectively prevent foreign matters from being deposited on a stored substrate, in accordance with a use environment.
SOLUTION: A substrate storage device 100 includes: an air supply part 110 for taking in outside air to the inside; an exhaust part 120 disposed so as to face the air supply part; a substrate placing plate 140 provided between the air supply part and the exhaust part and having a communication hole 142 for communication between them; an air supply filter 112 provided in the air supply part; and a fan 122 provided in the air supply part or the exhaust part. A state sensor for detecting a state of the inside of the substrate storage device 100, a particle charging device, or a temperature controller or a combination of two or more of them is/are removably attached to a mounting hole 150.
COPYRIGHT: (C)2011,JPO&INPIT
【課題】使用環境に応じて,収納された基板に異物が付着することを効果的に防止する。【解決手段】基板収納装置100内に外気を取り込む給気部110と,給気部に対向して配置された排気部120と,給気部と排気部との間に設けられ,これらの間を連通する連通孔142を有する基板載置板140と,給気部に設けられた給気フィルタ112と,給気部又は排気部に設けられたファン122とを備え,基板収納装置100内の状態を検出する状態センサと,パーティクル帯電装置と,温調装置とのいずれか又は2つ以上の組合せを装着孔150に着脱自在に設けた。【選択図】 図2