(EN) The embodiment of the invention provides a flexible acoustoelectric substrate and a preparation method thereof and a flexible acoustoelectric device. The preparation method of the flexible acoustoelectric substrate comprises the steps of: forming a flexible substrate; forming a plurality of piezoelectric components which are regularly arranged on the flexible substrate; and etching the flexible substrate by adopting inductive coupling plasma to form cavities corresponding to the piezoelectric components one by one. According to the invention, the cavities are formed in the flexible substrate in an inductive coupling plasma etching mode, the etching uniformity of the cavities is good, no etching residue is generated, the process is easy to implement, and the defects of low yield and complexprocess implementation of the method in the prior art are effectively overcome.
(ZH) 本发明实施例提供一种柔性声电基板及其制备方法、柔性声电装置。柔性声电基板的制备方法包括:形成柔性基底;在所述柔性基底上形成规则排布的多个压电组件;采用感应耦合等离子体刻蚀所述柔性基底,形成与所述多个压电组件一一对应的腔室。本发明通过感应耦合等离子体刻蚀方式在柔性基底内形成腔室,腔室的刻蚀均匀性好,无刻蚀残留,易于工艺实现,有效解决了现有方法存在良品率低、工艺实现复杂等缺陷。