(EN) Methods and apparatus for controlling manufacturing equipment are provided. In some embodiments, a manufacturing system may include an integrated controller having one or more inputs to receive input values corresponding to operating information of at least one of a process tool, a mass flow controller or at least one sub-fab auxiliary system, wherein the integrated controller is configured to receive the input values, determine that an error condition is matched based on the received input values, and control the at least one sub-fab auxiliary system to operate at a fail-safe operating mode responsive to the determined error condition.
(ZH) 本文提供用于控制制造设备的方法与装置。在一些实施方式中，制造系统可包含具有一或多个输入端的集成控制器以接收输入值，输入值对应于工艺工具、质量流量控制器或至少一个附属制造厂辅助系统中至少之一的操作信息，其中集成控制器被配置以接收输入值、根据所接收的输入值判定匹配了错误条件且响应所判定的错误条件而控制至少一个附属制造厂辅助系统，以使至少一个附属制造厂辅助系统在故障安全操作模式中操作。
