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1. CN104350440 - Integrated controller solution for monitoring and controlling manufacturing equipment

Office
Chine
Numéro de la demande 201380030188.8
Date de la demande 20.05.2013
Numéro de publication 104350440
Date de publication 11.02.2015
Numéro de délivrance 104350440
Date de délivrance 26.01.2018
Type de publication B
CIB
G05B 23/02
GPHYSIQUE
05COMMANDE; RÉGULATION
BSYSTÈMES DE COMMANDE OU DE RÉGULATION EN GÉNÉRAL; ÉLÉMENTS FONCTIONNELS DE TELS SYSTÈMES; DISPOSITIFS DE CONTRÔLE OU DE TEST DE TELS SYSTÈMES OU ÉLÉMENTS
23Test ou contrôle des systèmes de commande ou de leurs éléments
02Test ou contrôle électrique
G05B 19/418
GPHYSIQUE
05COMMANDE; RÉGULATION
BSYSTÈMES DE COMMANDE OU DE RÉGULATION EN GÉNÉRAL; ÉLÉMENTS FONCTIONNELS DE TELS SYSTÈMES; DISPOSITIFS DE CONTRÔLE OU DE TEST DE TELS SYSTÈMES OU ÉLÉMENTS
19Systèmes de commande à programme
02électriques
418Commande totale d'usine, c.à d. commande centralisée de plusieurs machines, p.ex. commande numérique directe ou distribuée (DNC), systèmes d'ateliers flexibles (FMS), systèmes de fabrication intégrés (IMS), productique (CIM)
CPC
G05B 23/0291
GPHYSICS
05CONTROLLING; REGULATING
BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
23Testing or monitoring of control systems or parts thereof
02Electric testing or monitoring
0205by means of a monitoring system capable of detecting and responding to faults
0259characterized by the response to fault detection
0286Modifications to the monitored process, e.g. stopping operation or adapting control
0291Switching into safety or degraded mode, e.g. protection and supervision after failure
Y02P 90/02
YSECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
90Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
02Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
Y02P 90/80
YSECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
90Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
80Management or planning
G05B 19/418
GPHYSICS
05CONTROLLING; REGULATING
BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
19Programme-control systems
02electric
418Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
G05B 15/02
GPHYSICS
05CONTROLLING; REGULATING
BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
15Systems controlled by a computer
02electric
Déposants 应用材料公司
Inventeurs 丹尼尔·O·克拉克
优瑟夫·A·罗勒迪
肖恩·W·克劳福德
马克西米·凯耶尔
托尼·H·唐
埃里克·里斯克
Mandataires 北京律诚同业知识产权代理有限公司 11006
北京律诚同业知识产权代理有限公司 11006
Données relatives à la priorité 13895978 16.05.2013 US
61/657,407 08.06.2012 US
Titre
(EN) Integrated controller solution for monitoring and controlling manufacturing equipment
(ZH) 用于监测及控制制造设备的集成控制器方案
Abrégé
(EN) Methods and apparatus for controlling manufacturing equipment are provided. In some embodiments, a manufacturing system may include an integrated controller having one or more inputs to receive input values corresponding to operating information of at least one of a process tool, a mass flow controller or at least one sub-fab auxiliary system, wherein the integrated controller is configured to receive the input values, determine that an error condition is matched based on the received input values, and control the at least one sub-fab auxiliary system to operate at a fail-safe operating mode responsive to the determined error condition.
(ZH) 本文提供用于控制制造设备的方法与装置。在一些实施方式中,制造系统可包含具有一或多个输入端的集成控制器以接收输入值,输入值对应于工艺工具、质量流量控制器或至少一个附属制造厂辅助系统中至少之一的操作信息,其中集成控制器被配置以接收输入值、根据所接收的输入值判定匹配了错误条件且响应所判定的错误条件而控制至少一个附属制造厂辅助系统,以使至少一个附属制造厂辅助系统在故障安全操作模式中操作。