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1. (WO2018140151) METHOD AND SYSTEM FOR IDENTIFYING DEFECTS OF INTEGRATED CIRCUITS



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INTERNATIONAL SEARCH REPORT (ISR)
Part 1:  1  2  3  4  5  6          Part 2:  A  B  C  D  E 
International application No. Applicant's or agent's file reference
PCT/US2017/067001 XTAL109APCT
International filing date (day/month/year) (Earliest) Priority Date (day/month/year)
18 December 2017 30 January 2017
Applicant
DONGFANG JINGYUAN ELECTRON LIMITED et al.
FOR FURTHER ACTION: See Form PCT/ISA/220 as well as, where applicable, item 5 below.
This international search report has been prepared by this International Searching Authority and is transmitted to the applicant according to Article 18. A copy is being transmitted to the International Bureau.
It is also accompanied by a copy of each prior art document cited in this report.
1. Basis of the report
a. With regard to the language, the international search was carried out on the basis of:
the international application in the language in which it was filed.
a translation of the international application into                                          which is the language of a translation furnished for the purposes of international search (Rules 12.3(a) and 23.1(b)).
b.
This international search report has been established taking into account the rectification of an obvious mistake authorized by or notified to this Authority under Rule 91 (Rule 43.6bis(a)).
c.
With regard to any nucleotide and/or amino acid sequence disclosed in the international application, the international search was carried out on the basis of a sequence listing:
2. Certain claims were found unsearchable
3. Unity of invention is lacking
4. Title of the invention
The text is approved as submitted by the applicant.
The text has been established by this Authority to read as follows:
5. Abstract
The text is approved as submitted by the applicant.
The text has been established, according to Rule 38.2, by this Authority as it appears in Box No. IV. The applicant may, within one month from the date of mailing of this international search report, submit comments to this Authority.
6. Drawings
a.
The figure of the drawings to be published with the abstract is Figure No.     1    
as suggested by the applicant.
as selected by this Authority, because the applicant failed to suggest a figure.
as selected by this Authority, because this figure better characterizes the invention.
b.
none of the figures is to be published with the abstract.

A. CLASSIFICATION OF SUBJECT MATTER

     H01L 21/66 (2006.01)i
According to International Patent Classification (IPC) or to both national classification and IPC

B. FIELDS SEARCHED

Minimum documentation searched (classification system followed by classification symbols):
Documentation searched other than minimum documentation to the extent that such documents are included in the fields searched:
Korean utility models and applications for utility modelsJapanese utility models and applications for utility models
Electronic data base consulted during the international search (name of data base and, where practicable, search terms used):
eKOMPASS(KIPO internal) & Keywords: defect, feature data, detection, identification, SEM image, contour, learning technique, D3D

C. DOCUMENTS CONSIDERED TO BE RELEVANT

Category* Citation of document, with indication, where appropriate, of the relevant passages Relevant to claim No.
(1)
Y
JP 2010-231044 A (TOPPAN PRINTING CO., LTD.) 14 October 2010 See paragraphs [0022]-[0045] and figures 1-11, 18.
1-20
(2)
Y
JP 2000-228430 A (HITACHI LTD.) 15 August 2000 See paragraphs [0074]-[0077], claims 2-3 and figure 7.
1-20
(3)
Y
US 5600734 A (KAZUO OKUBO et al.) 04 February 1997 See column 8, lines 24-26, 43-45 and figure 3.
5
(4)
A
US 2001-0033683 A1 (MAKI TANAKA et al.) 25 October 2001 See paragraphs [0052]-[0068] and figures 1-3.
1-20
(5)
A
US 6539106 B1 (HARRY S. GALLARDA et al.) 25 March 2003 See column 4, line 61 - column 6, line 35 and figures 2-3.
1-20
*
Special categories of cited documents:
"A"
document defining the general state of the art which is not considered to be of particular relevance
"E"
earlier application or patent but published on or after the international filing date
"L"
document which may throw doubts on priority claim(s) or which is cited to establish the publication date of another citation or other special reason (as specified)
"O"
document referring to an oral disclosure, use, exhibition or other means
"P"
document published prior to the international filing date but later than the priority date claimed
"T"
later document published after the international filing date or priority date and not in conflict with the application but cited to understand the principle or theory underlying the invention
"X"
document of particular relevance; the claimed invention cannot be considered novel or cannot be considered to involve an inventive step when the document is taken alone
"Y"
document of particular relevance; the claimed invention cannot be considered to involve an inventive step when the document is combined with one or more other such documents, such combination being obvious to a person skilled in the art
"&"
document member of the same patent family

D. INFORMATION ON PATENT FAMILY MEMBERS

Patent document cited in search report Publication date
(day/month/year)
Patent family member(s) Publication date
(day/month/year)
JP 2010-231044 A
14 October 2010
JP 5391774 B2
15 January 2014
JP 2000-228430 A
15 August 2000
JP 2007-281500 A
JP 3493312 B2
JP 4006119 B2
JP 4035242 B2
JP 4041630 B2
JP 4206192 B2
JP 4677701 B2
JP 2000-161932 A
JP 2000-161948 A
JP 2000-162143 A
JP 2000-164661 A
JP 2000-193594 A
JP 2002-148027 A
JP 2003-106829 A
JP 2005-181347 A
US 6388747 B2
US 6421122 B2
US 6476913 B1
US 6480279 B2
US 6493082 B2
US 6504609 B2
US 6567168 B2
US 6759655 B2
US 6903821 B2
US 6919564 B2
US 7049587 B2
US 7133550 B2
US 7266235 B2
US 7457453 B2
US 7894658 B2
US 7957579 B2
US 2001-0011706 A1
US 2001-0015805 A1
US 2001-0019411 A1
US 2001-0021019 A1
US 2001-0021020 A1
US 2002-0054703 A1
US 2002-0057831 A1
US 2002-0105648 A1
US 2002-0109088 A1
US 2002-0113967 A1
US 2003-0058444 A1
US 2003-0062487 A1
US 2003-0063792 A1
US 2007-0131877 A9
US 2007-0269101 A1
US 2008-0056559 A1
US 2008-0063257 A1
US 2010-0246933 A9
25 October 2007
03 February 2004
14 November 2007
16 January 2008
30 January 2008
07 January 2009
27 April 2011
16 June 2000
16 June 2000
16 June 2000
16 June 2000
14 July 2000
22 May 2002
09 April 2003
07 July 2005
14 May 2002
16 July 2002
05 November 2002
12 November 2002
10 December 2002
07 January 2003
20 May 2003
06 July 2004
07 June 2005
19 July 2005
23 May 2006
07 November 2006
04 September 2007
25 November 2008
22 February 2011
07 June 2011
09 August 2001
23 August 2001
06 September 2001
13 September 2001
13 September 2001
09 May 2002
16 May 2002
08 August 2002
15 August 2002
22 August 2002
27 March 2003
03 April 2003
03 April 2003
14 June 2007
22 November 2007
06 March 2008
13 March 2008
30 September 2010
US 5600734 A
04 February 1997
JP 06-037161 A
JP 06-034722 A
JP 05-218152 A
JP 05-165964 A
JP 05-101166 A
JP 2986995 B2
JP 3133795 B2
US 5825912 A
US 5872862 A
10 February 1994
10 February 1994
27 August 1993
02 July 1993
23 April 1993
06 December 1999
13 February 2001
20 October 1998
16 February 1999
US 2001-0033683 A1
25 October 2001
JP 2001-304842 A
US 7116816 B2
31 October 2001
03 October 2006
US 6539106 B1
25 March 2003
DE 10000364 B4
DE 10000364 A1
FR 2791775 A1
JP 4695239 B2
JP 2000-208575 A
KR 10-2000-0052623 A
KR 10-0653500 B1
TW 473772 A
31 January 2013
13 July 2000
06 October 2000
08 June 2011
28 July 2000
25 August 2000
04 December 2006
21 January 2002
Name and mailing address of the ISA/:
Korean Intellectual Property Office
189 Cheongsa-ro, Seo-gu, Daejeon Metropolitan City, 302-701
Republic of Korea
Facsimile No. +82-42-481-8578
Date of the actual completion of the international search:
05 April 2018
Date of mailing of the international search report:
05 April 2018
Authorized officer:
CHOI, Sang Won
Telephone No. +82-42-481-8291
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