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1. (WO2018140104) METHOD AND SYSTEM FOR DEFECT PREDICTION OF INTEGRATED CIRCUITS



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INTERNATIONAL SEARCH REPORT (ISR)
Part 1:  1  2  3  4  5  6          Part 2:  A  B  C  D  E 
International application No. Applicant's or agent's file reference
PCT/US2017/059027 XTAL107APCT
International filing date (day/month/year) (Earliest) Priority Date (day/month/year)
30 October 2017 30 January 2017
Applicant
DONGFANG JINGYUAN ELECTRON LIMITED et al.
FOR FURTHER ACTION: See Form PCT/ISA/220 as well as, where applicable, item 5 below.
This international search report has been prepared by this International Searching Authority and is transmitted to the applicant according to Article 18. A copy is being transmitted to the International Bureau.
It is also accompanied by a copy of each prior art document cited in this report.
1. Basis of the report
a. With regard to the language, the international search was carried out on the basis of:
the international application in the language in which it was filed.
a translation of the international application into                                          which is the language of a translation furnished for the purposes of international search (Rules 12.3(a) and 23.1(b)).
b.
This international search report has been established taking into account the rectification of an obvious mistake authorized by or notified to this Authority under Rule 91 (Rule 43.6bis(a)).
c.
With regard to any nucleotide and/or amino acid sequence disclosed in the international application, the international search was carried out on the basis of a sequence listing:
2. Certain claims were found unsearchable
3. Unity of invention is lacking
4. Title of the invention
The text is approved as submitted by the applicant.
The text has been established by this Authority to read as follows:
5. Abstract
The text is approved as submitted by the applicant.
The text has been established, according to Rule 38.2, by this Authority as it appears in Box No. IV. The applicant may, within one month from the date of mailing of this international search report, submit comments to this Authority.
6. Drawings
a.
The figure of the drawings to be published with the abstract is Figure No.     1    
as suggested by the applicant.
as selected by this Authority, because the applicant failed to suggest a figure.
as selected by this Authority, because this figure better characterizes the invention.
b.
none of the figures is to be published with the abstract.

A. CLASSIFICATION OF SUBJECT MATTER

     G01N 21/88 (2006.01)i; G01N 21/95 (2006.01)i; G01N 21/01 (2006.01)i
According to International Patent Classification (IPC) or to both national classification and IPC

B. FIELDS SEARCHED

Minimum documentation searched (classification system followed by classification symbols):
Documentation searched other than minimum documentation to the extent that such documents are included in the fields searched:
Korean utility models and applications for utility modelsJapanese utility models and applications for utility models
Electronic data base consulted during the international search (name of data base and, where practicable, search terms used):
eKOMPASS(KIPO internal) & Keywords: integrated circuit, wafer, care area, high-resolution, polygon, rendered image, chemical-mechanical planarization, electron beam

C. DOCUMENTS CONSIDERED TO BE RELEVANT

Category* Citation of document, with indication, where appropriate, of the relevant passages Relevant to claim No.
(1)
Y
US 2011-0170091 A1 (CHANG et al.) 14 July 2011 See paragraphs [0008], [0029], [0037]-[0038], [0045], [0060], [0085].
1-20
(2)
Y
US 2015-0324965 A1 (KLA-TENCOR CORPORATION) 12 November 2015 See paragraphs [0023], [0077], [0087], [0090], [0094].
1-20
(3)
A
US 2010-0332206 A1 (LEU, IYUN) 30 December 2010 See paragraphs [0015]-[0033] and figure 5.
1-20
(4)
A
US 2002-0035461 A1 (CHANG et al.) 21 March 2002 See paragraphs [0018]-[0035].
1-20
(5)
A
US 2008-0279444 A1 (FISCHER et al.) 13 November 2008 See paragraphs [0017]-[0027].
1-20
*
Special categories of cited documents:
"A"
document defining the general state of the art which is not considered to be of particular relevance
"E"
earlier application or patent but published on or after the international filing date
"L"
document which may throw doubts on priority claim(s) or which is cited to establish the publication date of another citation or other special reason (as specified)
"O"
document referring to an oral disclosure, use, exhibition or other means
"P"
document published prior to the international filing date but later than the priority date claimed
"T"
later document published after the international filing date or priority date and not in conflict with the application but cited to understand the principle or theory underlying the invention
"X"
document of particular relevance; the claimed invention cannot be considered novel or cannot be considered to involve an inventive step when the document is taken alone
"Y"
document of particular relevance; the claimed invention cannot be considered to involve an inventive step when the document is combined with one or more other such documents, such combination being obvious to a person skilled in the art
"&"
document member of the same patent family

D. INFORMATION ON PATENT FAMILY MEMBERS

Patent document cited in search report Publication date
(day/month/year)
Patent family member(s) Publication date
(day/month/year)
US 2011-0170091 A1
14 July 2011
KR 10-1717268 B1
KR 10-2012-0125273 A
TW 201203416 A
TW I546873 B
US 8559001 B2
US 9170209 B1
WO 2011-085255 A2
WO 2011-085255 A3
17 March 2017
14 November 2012
16 January 2012
21 August 2016
15 October 2013
27 October 2015
14 July 2011
10 November 2011
US 2015-0324965 A1
12 November 2015
CN 106415807 A
JP 2017-523390 A
KR 10-2017-0005379 A
TW 201602565 A
US 9401016 B2
WO 2015-175404 A1
15 February 2017
17 August 2017
12 January 2017
16 January 2016
26 July 2016
19 November 2015
US 2010-0332206 A1
30 December 2010
None
US 2002-0035461 A1
21 March 2002
AT 274199 T
AU 4355397 A
AU 8780998 A
AU 9396098 A
AU 9396198 A
AU 9775198 A
CN 1530752 A
DE 69730335 T2
DK 0927381 T3
EP 0927381 A1
EP 0927381 B1
EP 1012779 A2
EP 1012779 B1
EP 1023639 A1
EP 1023640 A1
EP 1023640 B1
EP 1023641 A1
ES 2224270 T3
JP 4624550 B2
JP 4647095 B2
JP 2001-516898 A
JP 2003-523545 A
JP 2003-526110 A
JP 2004-502961 A
KR 10-0596760 B1
KR 10-2001-0024113 A
KR 10-2001-0024116 A
KR 10-2001-0024117 A
PT 927381 E
TW 200500812 A
TW 200931201 A
TW 311690 B
TW 396393 B
TW 411494 B
TW I427429 B
US 2001-0000240 A1
US 2001-0028985 A1
US 2002-0019729 A1
US 2002-0168578 A1
US 2003-0018948 A1
US 2003-0126581 A1
US 2003-0165754 A1
US 2004-0015808 A1
US 2004-0197680 A1
US 2004-0243320 A1
US 2006-0242619 A1
US 5858580 A
US 6228539 B1
US 6258493 B1
US 6370679 B1
US 6420074 B2
US 6436590 B2
US 6453452 B1
US 6470489 B1
US 6566023 B2
US 6578188 B1
US 6757645 B2
US 6818385 B2
US 6979519 B2
US 7003755 B2
US 7093229 B2
US 7107571 B2
US 7356788 B2
US 7523027 B2
US 7617474 B2
WO 98-12605 A1
WO 99-14636 A1
WO 99-14637 A1
WO 99-14638 A1
WO 99-14706 A2
WO 99-14706 A3
15 September 2004
14 April 1998
05 April 1999
05 April 1999
05 April 1999
05 April 1999
22 September 2004
30 December 2004
20 September 2004
31 March 2004
18 August 2004
28 June 2000
07 October 2009
02 August 2000
02 August 2000
03 July 2013
02 August 2000
01 March 2005
02 February 2011
09 March 2011
02 October 2001
05 August 2003
02 September 2003
29 January 2004
07 July 2006
26 March 2001
26 March 2001
26 March 2001
29 October 2004
01 January 2005
16 July 2009
01 July 2009
01 July 2000
11 November 2000
21 February 2014
12 April 2001
11 October 2001
14 February 2002
14 November 2002
23 January 2003
03 July 2003
04 September 2003
22 January 2004
07 October 2004
02 December 2004
26 October 2006
12 January 1999
08 May 2001
10 July 2001
09 April 2002
16 July 2002
20 August 2002
17 September 2002
22 October 2002
20 May 2003
10 June 2003
29 June 2004
16 November 2004
27 December 2005
21 February 2006
15 August 2006
12 September 2006
08 April 2008
21 April 2009
10 November 2009
26 March 1998
25 March 1999
25 March 1999
25 March 1999
25 March 1999
06 May 1999
US 2008-0279444 A1
13 November 2008
JP 5865585 B2
JP 2010-527008 A
US 8073240 B2
WO 2008-137919 A1
17 February 2016
05 August 2010
06 December 2011
13 November 2008
Name and mailing address of the ISA/:
Korean Intellectual Property Office
189 Cheongsa-ro, Seo-gu, Daejeon Metropolitan City, 302-701
Republic of Korea
Facsimile No. +82-42-481-8578
Date of the actual completion of the international search:
05 February 2018
Date of mailing of the international search report:
05 February 2018
Authorized officer:
LEE, Hun Gil
Telephone No. +82-42-481-8525
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