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1. (WO1999054784) FREE-FORM NANOFABRICATION USING MULTI-PHOTON EXCITATION

Pub. No.:    WO/1999/054784    International Application No.:    PCT/US1999/008805
Publication Date: Fri Oct 29 01:59:59 CEST 1999 International Filing Date: Thu Apr 22 01:59:59 CEST 1999
IPC: G03F 7/038
G03F 7/20
Applicants: UNIVERSITY OF CONNECTICUT
Inventors: GOODMAN, Steven, L.
CAMPAGNOLA, Paul
Title: FREE-FORM NANOFABRICATION USING MULTI-PHOTON EXCITATION
Abstract:
A method and apparatus wherein small, two- or three-dimensional structures are formed by multiple-photon-absorbed photopolymerization and/or cross-linking of a precursor composition, that is, photopolymerization using multi-photon excitation. Use of multi-photon excitation allows fabrication of structures and structural features having at least one dimension of less than about 1 micron, preferably less than about 500 nm, more preferably less than about 250 nm, and most preferably of less than about 100 nm, in bulk phase as well as in solution, and from a wide variety of organic and inorganic precursor subunits, including synthetic polymers and biological polymers such as proteins, lipids, oligonucleotides, and the like.