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1. (WO2018029419) METHOD FOR TRANSFERRING A USEFUL LAYER

Pub. No.:    WO/2018/029419    International Application No.:    PCT/FR2017/052161
Publication Date: Fri Feb 16 00:59:59 CET 2018 International Filing Date: Wed Aug 02 01:59:59 CEST 2017
IPC: H01L 21/762
Applicants: SOITEC
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
Inventors: LANDRU, Didier
BEN MOHAMED, Nadia
KONONCHUK, Oleg
MAZEN, Frédéric
MASSY, Damien
REBOH, Shay
RIEUTORD, François
Title: METHOD FOR TRANSFERRING A USEFUL LAYER
Abstract:
The invention relates to a method for transferring a useful layer (3) onto a support (4), comprising steps of forming a fragilisation plane (2) by implanting light species in a first substrate (1), so as to form a useful layer (3) between this plane and a surface of the first substrate (1); applying the support (4) onto the surface of the first substrate (1) in order to form an assembly (5) to be fractured; fragilisation heat treating the assembly (5) to be fractured; and initiating and propagating a fracture wave in the first substrate (1) along the fragilisation plane (3). According to the invention, the initiation of the fracture wave is located in a central zone of the fragilisation plane (2) and the propagation speed of this wave is controlled in order to have sufficient speed. In this way, the interactions of the fracture wave with acoustic vibrations emitted during its initiation and/or its propagation are limited to a peripheral zone of the useful layer (3).