Поиск по международным и национальным патентным фондам

1. (WO2017205361) COMBINED PATCH AND DESIGN-BASED DEFECT DETECTION

Pub. No.:    WO/2017/205361    International Application No.:    PCT/US2017/033976
Publication Date: Fri Dec 01 00:59:59 CET 2017 International Filing Date: Wed May 24 01:59:59 CEST 2017
IPC: G01N 21/95
G01N 21/88
Applicants: KLA-TENCOR CORPORATION
Inventors: BRAUER, Bjorn
BHATTACHARYYA, Santosh
Title: COMBINED PATCH AND DESIGN-BASED DEFECT DETECTION
Abstract:
Defect detection is performed by comparing a test image and a reference image with a rendered design image, which may be generated from a design file. This may occur because a comparison of the test image and another reference image was inconclusive due to noise. The results of the two comparisons with the rendered design image can indicate whether a defect is present in the test image.