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1. (WO2013162792) ELECTROSTATIC CHUCK HAVING REDUCED POWER LOSS

Pub. No.:    WO/2013/162792    International Application No.:    PCT/US2013/033001
Publication Date: Fri Nov 01 00:59:59 CET 2013 International Filing Date: Wed Mar 20 00:59:59 CET 2013
IPC: H01L 21/683
H02N 13/00
B23Q 3/15
C04B 35/00
Applicants: APPLIED MATERIALS, INC.
MAKHRATCHEV, Konstantin
SUN, Jennifer, Y.
Inventors: MAKHRATCHEV, Konstantin
SUN, Jennifer, Y.
Title: ELECTROSTATIC CHUCK HAVING REDUCED POWER LOSS
Abstract:
Embodiments of the invention generally relate to an electrostatic chuck having reduced power loss, and methods and apparatus for reducing power loss in an electrostatic chuck, as well as methods for testing and manufacture thereof. In one embodiment, an electrostatic chuck is provided. The electrostatic chuck includes a conductive base, and a ceramic body disposed on the conductive base, the ceramic body comprising an electrode and one or more heating elements embedded therein, wherein the ceramic body comprises a dissipation factor of about 0.11 to about 0.16 and a capacitance of about 750 picoFarads to about 950 picoFarads between the electrode and the one or more heating elements.