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1. (WO2009107603) PROCESS AND APPARATUS FOR PRODUCING CARBON NANOTUBE, CARBON NANOTUBE FIBER, AND THE LIKE

Pub. No.:    WO/2009/107603    International Application No.:    PCT/JP2009/053265
Publication Date: Fri Sep 04 01:59:59 CEST 2009 International Filing Date: Wed Feb 25 00:59:59 CET 2009
IPC: C01B 31/02
Applicants: NATIONAL UNIVERSITY CORPORATION SHIZUOKA UNIVERSITY
国立大学法人静岡大学
INOUE, Yoku
井上 翼
OKADA, Morihiro
岡田 守弘
Inventors: INOUE, Yoku
井上 翼
OKADA, Morihiro
岡田 守弘
Title: PROCESS AND APPARATUS FOR PRODUCING CARBON NANOTUBE, CARBON NANOTUBE FIBER, AND THE LIKE
Abstract:
A CVD apparatus (10) which includes an electric furnace (12), a reaction vessel pipe (14) and a small vessel substrate (15) which both are disposed in the furnace, and a heater (16) and a thermocouple (18) which are disposed around the periphery of the pipe. One end of the reaction vessel pipe (14) has been connected to a gas supply part (22), and the other has been connected to a pressure control valve (23) and a gas discharge part (24). The part (22), valve (23), and part (24) are controlled by a control part (20). The reaction vessel pipe (14) is evacuated to vacuum by the gas discharge part (24). The inside of the small vessel substrate (15) is heated with the heater (16) to heat and sublimate iron chloride (26) serving as a catalyst. Thereafter, acetylene gas (30) is caused to flow into the small vessel substrate (15) by the gas supply part (22). As a result, the iron chloride undergoes a gas phase reaction with the acetylene gas to form carbon nanotube growth nuclei on a substrate (28) having a silicon oxide layer formed thereon. Thereafter, carbon nanotubes grow while being vertically oriented.