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1. (WO2016202661) IN-PLANE OVERTRAVEL STOPS FOR MEMS MICROPHONE

Pub. No.:    WO/2016/202661    International Application No.:    PCT/EP2016/063013
Publication Date: Fri Dec 23 00:59:59 CET 2016 International Filing Date: Thu Jun 09 01:59:59 CEST 2016
IPC: H04R 19/00
H04R 31/00
H04R 7/26
B81B 3/00
H04R 19/04
H04R 7/20
Applicants: ROBERT BOSCH GMBH
Inventors: DOLLER, Andy
GUO, Zhijun
Title: IN-PLANE OVERTRAVEL STOPS FOR MEMS MICROPHONE
Abstract:
A MEMS microphone including a plurality of overtravel stops (OTS) connected to a perimeter of a membrane of the MEMS microphone. The OTS are released from a backplate layer during manufacturing and are configured to contact the backplate to restrict movement of the OTS and thus restrict movement of the membrane of the MEMS microphone. Embodiments of the invention provide, in particular, an overtravel stop that limits movement of the membrane in a radial direction.