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1. (WO2019050620) AUTOMATIC CLEANING MACHINE FOR CLEANING PROCESS KITS



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INTERNATIONAL SEARCH REPORT (ISR)
Part 1:  1  2  3  4  5  6          Part 2:  A  B  C  D  E 
International application No. Applicant's or agent's file reference
PCT/US2018/041670 025580WO01
International filing date (day/month/year) (Earliest) Priority Date (day/month/year)
11 July 2018 07 September 2017
Applicant
APPLIED MATERIALS, INC.
FOR FURTHER ACTION: See Form PCT/ISA/220 as well as, where applicable, item 5 below.
This international search report has been prepared by this International Searching Authority and is transmitted to the applicant according to Article 18. A copy is being transmitted to the International Bureau.
It is also accompanied by a copy of each prior art document cited in this report.
1. Basis of the report
a. With regard to the language, the international search was carried out on the basis of:
the international application in the language in which it was filed.
a translation of the international application into                                          which is the language of a translation furnished for the purposes of international search (Rules 12.3(a) and 23.1(b)).
b.
This international search report has been established taking into account the rectification of an obvious mistake authorized by or notified to this Authority under Rule 91 (Rule 43.6bis(a)).
c.
With regard to any nucleotide and/or amino acid sequence disclosed in the international application, the international search was carried out on the basis of a sequence listing:
2. Certain claims were found unsearchable
3. Unity of invention is lacking
4. Title of the invention
The text is approved as submitted by the applicant.
The text has been established by this Authority to read as follows:
5. Abstract
The text is approved as submitted by the applicant.
The text has been established, according to Rule 38.2, by this Authority as it appears in Box No. IV. The applicant may, within one month from the date of mailing of this international search report, submit comments to this Authority.
6. Drawings
a.
The figure of the drawings to be published with the abstract is Figure No.     1    
as suggested by the applicant.
as selected by this Authority, because the applicant failed to suggest a figure.
as selected by this Authority, because this figure better characterizes the invention.
b.
none of the figures is to be published with the abstract.

A. CLASSIFICATION OF SUBJECT MATTER

     H01L 21/67 (2006.01)i; H01L 21/02 (2006.01)i
According to International Patent Classification (IPC) or to both national classification and IPC

B. FIELDS SEARCHED

Minimum documentation searched (classification system followed by classification symbols):
Documentation searched other than minimum documentation to the extent that such documents are included in the fields searched:
Korean utility models and applications for utility modelsJapanese utility models and applications for utility models
Electronic data base consulted during the international search (name of data base and, where practicable, search terms used):
eKOMPASS(KIPO internal) & keywords: cleaning apparatus, process part, kits, fluid, chamber

C. DOCUMENTS CONSIDERED TO BE RELEVANT

Category* Citation of document, with indication, where appropriate, of the relevant passages Relevant to claim No.
(1)
Y
US 2011-0180117 A1 (HONG SHIH et al.) 28 July 2011 See paragraphs [0032]-[0045], claim 41 and figures 1-6.
1-15
(2)
Y
US 2013-0167885 A1 (QUANTUM GLOBAL TECHNOLOGIES, LLC) 04 July 2013 See paragraphs [0019]-[0046], claim 7 and figures 1-4.
1-15
(3)
A
US 6394023 B1 (STEVEN C. CROCKER) 28 May 2002 See claim 1 and figures 1A-3.
1-15
(4)
A
US 2016-0233115 A1 (HERMES-EPITEK CORPORATION) 11 August 2016 See paragraph [0031] and figure 5.
1-15
(5)
A
JP 2014-210980 A (QUANTAM GLOBAL TECHNOLOGIES LLC) 13 November 2014 See claim 1 and figures 1A-7.
1-15
*
Special categories of cited documents:
"A"
document defining the general state of the art which is not considered to be of particular relevance
"E"
earlier application or patent but published on or after the international filing date
"L"
document which may throw doubts on priority claim(s) or which is cited to establish the publication date of another citation or other special reason (as specified)
"O"
document referring to an oral disclosure, use, exhibition or other means
"P"
document published prior to the international filing date but later than the priority date claimed
"T"
later document published after the international filing date or priority date and not in conflict with the application but cited to understand the principle or theory underlying the invention
"X"
document of particular relevance; the claimed invention cannot be considered novel or cannot be considered to involve an inventive step when the document is taken alone
"Y"
document of particular relevance; the claimed invention cannot be considered to involve an inventive step when the document is combined with one or more other such documents, such combination being obvious to a person skilled in the art
"&"
document member of the same patent family

D. INFORMATION ON PATENT FAMILY MEMBERS

Patent document cited in search report Publication date
(day/month/year)
Patent family member(s) Publication date
(day/month/year)
US 2011-0180117 A1
28 July 2011
CN 101529560 A
CN 101529560 B
KR 10-1467591 B1
KR 10-2009-0090309 A
SG 177978 A1
TW 200834705 A
TW I426556 B
US 2008-0092920 A1
US 7942973 B2
US 8215321 B2
WO 2008-048443 A1
09 September 2009
13 April 2011
01 December 2014
25 August 2009
28 February 2012
16 August 2008
11 February 2014
24 April 2008
17 May 2011
10 July 2012
24 April 2008
US 2013-0167885 A1
04 July 2013
CN 102696094 A
CN 102696094 B
JP 2013-504694 A
JP 5778156 B2
KR 10-1700260 B1
KR 10-2012-0073278 A
MY 160167 A
SG 10201405733 A
SG 179155 A1
TW 201119761 A
TW I533946 B
US 2011-0061685 A1
US 8372211 B2
US 8714166 B2
WO 2011-034841 A2
WO 2011-034841 A3
26 September 2012
25 March 2015
07 February 2013
16 September 2015
26 January 2017
04 July 2012
28 February 2017
27 November 2014
27 April 2012
16 June 2011
21 May 2016
17 March 2011
12 February 2013
06 May 2014
24 March 2011
16 June 2011
US 6394023 B1
28 May 2002
CN 1432071 A
CN 1432071 C
EP 1268877 A2
JP 2003-529219 A
KR 10-2002-0086699 A
TW 503448 B
WO 01-73822 A2
WO 01-73822 A3
23 July 2003
18 January 2006
02 January 2003
30 September 2003
18 November 2002
21 September 2002
04 October 2001
07 March 2002
US 2016-0233115 A1
11 August 2016
CN 106033738 A
JP 2016-149533 A
TW 201128723 A
TW 201630105 A
TW I426579 B
US 2011-0186078 A1
US 2013-0219639 A1
US 2014-0000655 A1
US 2016-0240398 A1
US 8448288 B2
US 8719993 B2
19 October 2016
18 August 2016
16 August 2011
16 August 2016
11 February 2014
04 August 2011
29 August 2013
02 January 2014
18 August 2016
28 May 2013
13 May 2014
JP 2014-210980 A
13 November 2014
AT 518018 T
CN 101342534 A
CN 101342534 B
CN 103406300 A
CN 103406300 B
EP 2011897 A2
EP 2011897 A3
EP 2011897 B1
EP 2011897 B8
EP 2383049 A1
EP 2383049 B1
JP 2009-007674 A
JP 5596909 B2
JP 5935174 B2
KR 10-1027612 B1
KR 10-2009-0004598 A
SG 148975 A1
SG 182970 A1
TW 200908135 A
TW I479559 B
US 2009-0000641 A1
US 2013-0037062 A1
US 8691023 B2
WO 2009-005742 A1
15 August 2011
14 January 2009
28 August 2013
27 November 2013
03 November 2017
07 January 2009
04 March 2009
27 July 2011
28 September 2011
02 November 2011
07 August 2013
15 January 2009
24 September 2014
15 June 2016
06 April 2011
12 January 2009
29 January 2009
30 August 2012
16 February 2009
01 April 2015
01 January 2009
14 February 2013
08 April 2014
08 January 2009
Name and mailing address of the ISA/:
Korean Intellectual Property Office
189 Cheongsa-ro, Seo-gu, Daejeon Metropolitan City, 302-701
Republic of Korea
Facsimile No. +82-42-481-8578
Date of the actual completion of the international search:
30 October 2018
Date of mailing of the international search report:
30 October 2018
Authorized officer:
CHOI, Sang Won
Telephone No. +82-42-481-8291
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