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1. (WO2019050620) AUTOMATIC CLEANING MACHINE FOR CLEANING PROCESS KITS
Nota: O texto foi obtido por processos automáticos de reconhecimento ótico de caracteres.
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What is claimed is:

1. A system for cleaning a process part, comprising:

a body comprised a first module and a second module;

a cleaning agent source;

a supply conduit coupled to the body and the cleaning agent source; and a return conduit coupled to the body and a cleaning agent source.

2. The system of claim 1 , further comprising a control system, the control system comprising:

a controller;

at least one instrument coupled to the supply conduit or the return conduit; and

at least one valve disposed in the supply conduit or the return conduit;

3. The system of claim , wherein the cleaning agent source comprises more than one cleaning agent.

4. The system of claim 1 , wherein the body is configured to clean a portion of a part disposed between the first module and the second module.

5. The system of claim 4, further comprising a gas source coupled to the body.

8. The system of claim 2, wherein the control system is configured to selectively deliver a cleaning agent to the body.

7. The system of claim 1 , wherein the return conduit is configured to selectively deliver a cleaning agent to the cleaning agent source or to a drain,

8. A system for cleaning a process part, comprising:

a body comprised a first module and a second module;

a process volume defined by the first module and a second module and a portion of the process chamber part;

a cleaning agent source;

a plurality of supply conduits coupled to the body and the cleaning agent source; and

a plurality of return conduits coupled to the body and a cleaning agent source.

9. The system of claim 8, further comprising a control system, the control system comprising:

a controller;

at least one instrument coupled to a supply conduit or return conduit; and at least one valve disposed in a supply conduit or a return conduit;

10. The system of claim 8, wherein the cleaning agent source comprises more than one cleaning agent source coupled to the plurality of supply conduits.

1 1. The system of claim 8, wherein the body is configured to clean at least a portion of a part disposed between the first module and the second module.

12. The system of claim 11 , further comprising a gas source is coupled to the process volume.

13. The system of claim 9, wherein the control system is configured to selectively deliver a cleaning agent to the body.

14. The system of claim 8, wherein the return conduit is configured to selectively deliver a cleaning agent to the cleaning agent source or a drain.

15. The system of claim 10, where in the each of the plurality of supply conduits is configured to deliver a cleaning agent from the more than one cleaning agent sources.