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1. (WO2018203282) SCATTEROMETRY SYSTEM AND METHOD OF USING THE SAME

Pub. No.:    WO/2018/203282    International Application No.:    PCT/IB2018/053093
Publication Date: Fri Nov 09 00:59:59 CET 2018 International Filing Date: Fri May 04 01:59:59 CEST 2018
IPC: G01N 21/47
Applicants: 3M INNOVATIVE PROPERTIES COMPANY
Inventors: ATKINSON, Matthew R. C.
Title: SCATTEROMETRY SYSTEM AND METHOD OF USING THE SAME
Abstract:
Microscatterometry system for generating an angularly resolved scattered light profile from the collected data.