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1. (WO2014090289) POSITIONING DEVICE, X-Y TABLE, AND LIFTING UNIT

Pub. No.:    WO/2014/090289    International Application No.:    PCT/EP2012/075156
Publication Date: Fri Jun 20 01:59:59 CEST 2014 International Filing Date: Thu Dec 13 00:59:59 CET 2012
IPC: B23Q 1/54
H01L 21/68
Applicants: EITZENBERGER LUFTLAGERTECHNIK GMBH
Inventors: EITZENBERGER, Hans
HARNISCH, Jan
Title: POSITIONING DEVICE, X-Y TABLE, AND LIFTING UNIT
Abstract:
The invention relates to a positioning device (10) comprising a base unit (12) and a support unit (14) which is mounted on the base unit (12), can be horizontally moved relative to the base unit (12), and is designed to support an object to be positioned. According to the invention, one or more lifting units (18, 20, 22), each of which extends from the base unit (12) to the support unit (14), are arranged between the base unit (12) and the support unit (14). Each of the lifting units (18, 20, 22) can be controlled in such a way that a vertical distance between the base unit (12) and the support unit (14) can be controlled, said vertical distance being associated with the respective lifting unit (18, 20, 22), and so a pivoting movement of the support unit (14) relative to the base unit (12) about a horizontal axis can be controlled. The lifting units (18, 20, 22) can each be equipped with a deployable and retractable piston (86). The invention further relates to an X-Y table comprising such a positioning device.