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1. (WO2006031455) LITHOGRAPHY TECHNIQUE USING SILICONE MOLDS
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CLAIMS
1. A method comprising:
A) filling a silicone mold having a patterned surface with a curable (meth)acrylate formulation, where the curable (meth)acrylate formulation comprises (a) fluorofunctional (meth)acrylate or a combination of a fluorofunctional (meth)acrylate and a (meth)acrylate, (b) a photoinitiator, optionally (c) an antioxidant, optionally (d) a fluorescent dye, optionally (e) a reactive diluent, optionally (f) a light stabilizer, optionally (g) a photosensitizer, optionally (h) a wetting agent, and optionally Q) an ultra-violet radiation absorber;
B) curing the curable (meth)acrylate formulation to form a patterned feature;
C) separating the silicone mold and the patterned feature;
optionally D) etching the patterned feature; and
optionally E) repeating steps A) to D) reusing the silicone mold.

2. The method of claim 1, where the fluorofunctional (meth)acrylate comprises heptadecafluorodecyl acrylate, octafluoropentyl acrylate, octafluoropentyl methacrylate, tetrafluopropyl acrylate, trifluoroethyl acrylate, trifluoroethyl methacrylate, or a combination thereof.

3. The method of claim 1 or claim 2, where the (meth)acrylate is present and is selected from the group consisting of 2(2-ethoxyethoxy)ethyl acrylate, 2-acryloylethyl-2-hydroxyethyl-o-phthalate, 2-ethoxyethoxyethyl acrylate, 2-ethoxyethyl acrylate, 2-ethoxyethylmethacrylate, 2-ethylhexyl methacrylate, 2-hydroxyethyl acrylate, 2-hydroxyethyl methacrylate, 2-hydroxypropyl acrylate, 2-hydroxypropyl methacrylate, 2-methoxyethyl acrylate, 2-phenoxyethyl acrylate, 4-hydroxybutyl acrylate, acrylic acid, alkoxylated lauryl acrylate, alkoxylated phenol acrylate, alkoxylated tetrahydrofurfuryl acrylate, allyl methacrylate, benzyl acrylate, benzyl methacrylate, beta carboxy ethyl acrylate, butyl diglycol methacrylate, caprolactone acrylate, cetyl acrylate, cyclic trimethylolpropane formal acrylate, cyclohexyl acrylate, cyclohexyl methacrylate, cyclohexylmethacrylate,
dicyclopentadienyl methacrylate, diethylaminoethyl methacrylate, dimethyl aminoethyl acrylate, dimethyl aminoethyl methacrylate, dimethyl aminoethyl methacrylate
methylchloride salt, EO7 ethyl capped methacrylate, epoxy acrylate, ethoxyethyl
methacrylate, ethoxylated (10) hydroxyethyl methacrylate, ethoxylated (2) hydroxyethyl methacrylate, ethoxylated (5) hydroxyethyl methacrylate, ethoxylated phenol acrylate, ethyl methacrylate, ethyl triglycol methacrylate, glycidyl methacrylate, hydroxyethyl acrylate, isobornyl acrylate, isobornyl methacrylate, isobutyl acrylate, isobutyl methacrylate, isodecyl acrylate, isooctyl acrylate, lauryl acrylate, lauryl methacrylate, lauryl tridecyl acrylate, methacrylic acid, methacrylonitrile, methoxy polyethylene glycol (350) monoacrylate E06, methyl methacrylate, n-butyl methacrylate, octyl decyl acrylate, polypropylene glycol monomethacrylate, propoxylated (2) allyl methacrylate, stearyl acrylate, stearyl methacrylate, tert-butyl amino methacrylate, tert-butyl acrylate, tert-butyl methacrylate, tetrahydrofurfuryl acrylate, tetrahydrofurfuryl methacrylate, tetrahydrofuryl acrylate, tetrahydrofuryl methacrylate, tetrahydrogenfuranmethacrylate, tridecyl acrylate, tridecyl methacrylate, trimethylcyclohexylmethacrylate, urethane acrylate, 1,12-dodecandiol dimethacrylate, 1,3-butandiol dimethacrylate, 1,3-butylene glycol diacrylate, 1,3-butylene glycol dimethacrylate, 1,4-butanediol diacrylate, 1,4 butanediol dimethacrylate, 1,6-hexanediol diacrylate, 1,6-hexanediol dimethacrylate, alkoxylated aliphatic diacrylate, aliphatic dimethacrylate, bisphenol A diacrylate, bisphenol A ethoxylate dimethacrylate, butanediol dimethacrylate, diethylene glycol diacrylate, diethylene glycol dimethacrylate, dipropylene glycol diacrylate, dipropylene glycol dimethacrylate, ethoxylated bisphenol-A diacrylate, ethylene glycol dimethacylate, neopentyl glycol diacrylate, polyethylene glycol 200 diacrylate, polyethylene glycol 200 dimethacrylate, polypropylene glycol 400 dimethacrylate, propoxylated (2) neopentyl glycol diacrylate, tetraethylene glycol diacrylate, tetraethylene glycol
dimethacrylate, tricyclodecane dimethanol diacrylate, Methylene glycol dimethacrylate, tripropylene glycol diacrylate, ethoxylated trimethylol propane triacrylate, glycelyl propoxy triacrylate, pentaerythritol triacrylate, propoxylated glycerol triacrylate, propoxylated trimethylolpropane triacrylate, triacrylate ester, trimethacrylate ester, trimethylol propane triacrylate, trimethylol propane trimethacrylate, trimethylolpropane ethoxy triacrylate, tetrafunctional acrylate, acrylate ester of pentaerythritol, pentaerythritol tetraacrylate, dipentaerythritol pentaacrylate, ditrimethylolpropane tetraacrylate, ethoxylated
pentaerythritol tetraacrylate, caprolactone modified dipentaerythritol hexaacrylate, caprolactone modified dipentaerythritol hexamethacrylate and combinations thereof.

4. The method of any one of the preceding claims where component (b) comprises: alpha-hydroxy ketone; phenylglyoxylate; benzildimethyl-ketal; alpha-aminoketone; mono acyl phosphine; bis acyl phosphine; benzoin ether; benzoin isobutyl ether; benzoin isopropyl ether; benzophenone; benzoylbenzoic acid; methyl benzoylbenzoate; 4-benzoyl-4'-methyldiphenyl sulfide; benzylmethylketal; 2-n-butoxyethyl-4-diraethylaminobenzoate; 2-chlorothioxanthone; 2,4-diethylthioxanthanone; 1 -hydroxy-cyclohexyl-phenyl-ketone, methylbenzoylformate; phenyl bis(2,4,6-trimethyl benzoyl)- phosphine oxide; a combination of bis(2,6-dimethoxybenzoyl)-2,4,4-trimethyl-pentylphosphineoxide and 1-hydroxy-cyclohexyl-phenyl-ketone ; 2-hydroxy-2-methyl- 1 -phenyl-propan- 1 -one ; 1 -hydroxy-cyclohexyl-phenyl-ketone ; 2-benzyl-2-dimethylamino- 1 -(4-morpholinophenyl)-butanone- 1 ; 2-methyl-l[4-(methylthio)phenyl]-2-morpholinopropan-l-one; a combination of 50 % 2,4,6-trimethylbenzoyl-diphenyl-phosphineoxide and 50 % 2-hydroxy-2-methyl-l-phenyl~propan-1-one; or a combination thereof.

5. The method of any one of the preceding claims, where at least one optional component is present and component (c) comprises a phenolic antioxidant or a combination of a phenolic antioxidant and a stabilizer; component (d) comprises rhodamine 6G, 2,2' -(2,5-thiophendiyl)bis[(tert)-butylbenzoxazole], or a combination thereof; component (e) comprises a maleic anhydride, a vinyl acetate, a vinyl ester, a vinyl ether, a fluoro alkyl vinyl ether, a vinyl pyrrolidone, a styrene, or a combination thereof; component (f) comprises decanedioic acid, bis(2,2,6,6-tetramethyl-l-(octyloxy)-4-piperidinyl) ester, reaction products with 1,1-dimethylethylhydroperoxide and octane, or a combination thereof; component (g) comprises a ketone, coumarin dye, xanthene dye, acridine dye, thiazole dye, thiazine dye, oxazine dye, azine dye, aminoketone dye, porphyrin, aromatic polycyclic hydrocarbon, p-substituted aminostyryl ketone compound, aminotriaryl methane, merocyanine, squarylium dye, pyridinium dye, or combination thereof; component (h) comprises silicone diacrylate, silicone hexaacrylate, polyether modified polydimethylsiloxane, polyether modified acryl functional polydimethylsiloxane, polyacrylic copolymer, crosslinkable silicone acrylate, crosslinkable silicone polyether acrylate, or a combination thereof; component (i) comprises glycidoxypropyltriethoxysilane, glycidoxypropyltrimethoxysilane,
methacryloxypropyltriethoxysilane, methacryloxypropyltrimethoxysilane, tetraethoxysilane, tetramethoxysilane, vinyltriethoxysilane, vinyltrimethoxysilane, or a combination thereof; and component (j) comprises l-methoxy-2-propanol and 1,3-benzenediol, 4-[4,6-bis(2,4- dimethylphenyl) - l,3,5-triazin-2-yl]- reaction products with [(dodecyloxy)methyl]oxirane and oxirane mono[(C10-16 alkyloxy)methyl derivatives.

6. The method of any one of the preceding claims, further comprising:
I) casting a curable silicone composition against a master,
II) curing the curable silicone composition to form the silicone mold, and
IH) removing the silicone mold from the master before step A).

7. The method of any one of the preceding claims, where the method is used in a lithography technique selected from the group consisting of: imprint molding, step and flash imprint molding, solvent assisted micromolding, microtransfer molding, and micromolding in capillaries.

8. A patterned feature prepared by the method of any one of the preceding claims.

9. The method of any one of claims 1 to 7 used to prepare a resist layer or a permanent layer in a lithography technique selected from the group consisting of imprint molding, step and flash imprint molding, solvent assisted micromolding, microtransfer molding, and micromolding in capillaries.

10. The method of any one of claims 1 to 7 used to prepare a device selected from the group consisting of a display device, a photodetector, a transistor, an optical waveguide, a coupler, an interferometer, and a light emitting diode.