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1. (WO2014025637) APPARATUS AND METHODS FOR HANDLING WORKPIECES OF DIFFERENT SIZES

Pub. No.:    WO/2014/025637    International Application No.:    PCT/US2013/053398
Publication Date: Fri Feb 14 00:59:59 CET 2014 International Filing Date: Sat Aug 03 01:59:59 CEST 2013
IPC: H01L 21/677
H01L 21/687
Applicants: NORDSON CORPORATION
Inventors: FAZIO, James, P.
FOOTE, David, K.
GETTY, James, D.
Title: APPARATUS AND METHODS FOR HANDLING WORKPIECES OF DIFFERENT SIZES
Abstract:
Apparatus and methods for plasma processing workpieces of different diameters. The apparatus includes a lift plate (52) having an outer perimeter (65), an opening (70) inside of the outer perimeter (65), and a gap (72) extending between the opening (70) and the outer perimeter (65). The lift plate (52) includes annular rims (120) of different inner diameters and that are configured to respectively support the first and second workpieces (28, 30).