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1. (WO2019064172) PHOTORESIST PATTERNING ON SILICON NITRIDE



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INTERNATIONAL SEARCH REPORT (ISR)
Part 1:  1  2  3  4  5  6          Part 2:  A  B  C  D  E 
International application No. Applicant's or agent's file reference
PCT/IB2018/057394 YOR820162076
International filing date (day/month/year) (Earliest) Priority Date (day/month/year)
25 September 2018 29 September 2017
Applicant
INTERNATIONAL BUSINESS MACHINES CORPORATION et al
FOR FURTHER ACTION: See Form PCT/ISA/220 as well as, where applicable, item 5 below.
This international search report has been prepared by this International Searching Authority and is transmitted to the applicant according to Article 18. A copy is being transmitted to the International Bureau.
It is also accompanied by a copy of each prior art document cited in this report.
1. Basis of the report
a. With regard to the language, the international search was carried out on the basis of:
the international application in the language in which it was filed.
a translation of the international application into                                          which is the language of a translation furnished for the purposes of international search (Rules 12.3(a) and 23.1(b)).
b.
This international search report has been established taking into account the rectification of an obvious mistake authorized by or notified to this Authority under Rule 91 (Rule 43.6bis(a)).
c.
With regard to any nucleotide and/or amino acid sequence disclosed in the international application, the international search was carried out on the basis of a sequence listing:
2. Certain claims were found unsearchable
3. Unity of invention is lacking
4. Title of the invention
The text is approved as submitted by the applicant.
The text has been established by this Authority to read as follows:
5. Abstract
The text is approved as submitted by the applicant.
The text has been established, according to Rule 38.2, by this Authority as it appears in Box No. IV. The applicant may, within one month from the date of mailing of this international search report, submit comments to this Authority.
6. Drawings
a.
The figure of the drawings to be published with the abstract is Figure No.     1    
as suggested by the applicant.
as selected by this Authority, because the applicant failed to suggest a figure.
as selected by this Authority, because this figure better characterizes the invention.
b.
none of the figures is to be published with the abstract.

A. CLASSIFICATION OF SUBJECT MATTER

According to International Patent Classification (IPC) or to both national classification and IPC

B. FIELDS SEARCHED

Minimum documentation searched (classification system followed by classification symbols):
     G03F7; H01L21
Documentation searched other than minimum documentation to the extent that such documents are included in the fields searched:
Electronic data base consulted during the international search (name of data base and, where practicable, search terms used):
CNABS; CNTXT; CNKI; SIPOABS; DWPI; IEEE: polymer, alkyl, scum+, phenyl, amine, wafer, photoresist+, brush+, silicon, acid+, photoacid, pattern, lithography

C. DOCUMENTS CONSIDERED TO BE RELEVANT

Category* Citation of document, with indication, where appropriate, of the relevant passages Relevant to claim No.
(1)
A
WO 02054458 A2 (IBM ET AL.) 11 July 2002 (2002-07-11)
1-25
the whole document
(2)
A
EP 1705150 A2 (WISCONSIN ALUMNI RES FOUND) 27 September 2006 (2006-09-27)
1-25
the whole document
(3)
A
US 9082718 B2 (SK HYNIX INC) 14 July 2015 (2015-07-14)
1-25
the whole document
(4)
A
US 9632408 B1 (IBMET AL.) 25 April 2017 (2017-04-25)
1-25
the whole document
*
Special categories of cited documents:
"A"
document defining the general state of the art which is not considered to be of particular relevance
"E"
earlier application or patent but published on or after the international filing date
"L"
document which may throw doubts on priority claim(s) or which is cited to establish the publication date of another citation or other special reason (as specified)
"O"
document referring to an oral disclosure, use, exhibition or other means
"P"
document published prior to the international filing date but later than the priority date claimed
"T"
later document published after the international filing date or priority date and not in conflict with the application but cited to understand the principle or theory underlying the invention
"X"
document of particular relevance; the claimed invention cannot be considered novel or cannot be considered to involve an inventive step when the document is taken alone
"Y"
document of particular relevance; the claimed invention cannot be considered to involve an inventive step when the document is combined with one or more other such documents, such combination being obvious to a person skilled in the art
"&"
document member of the same patent family

D. INFORMATION ON PATENT FAMILY MEMBERS

Patent document cited in search report Publication date
(day/month/year)
Patent family member(s) Publication date
(day/month/year)
WO 02054458 A2
11 July 2002
JP 3506248 B2
DE 10197137 T1
CN 1527960 A
AU 2002234603 A1
DE 10197137 B4
CN 100418011 C
US 2004132290 A1
WO 02054458 A3
JP 2002303992 A
US 6946390 B2
15 March 2004
24 December 2003
08 September 2004
16 July 2002
31 July 2008
10 September 2008
08 July 2004
27 March 2003
18 October 2002
20 September 2005
EP 1705150 A2
27 September 2006
US 7851252 B2
EP 1705150 A3
US 2009206054 A1
US 2007020749 A1
US 7514764 B2
14 December 2010
08 November 2006
20 August 2009
25 January 2007
07 April 2009
US 9082718 B2
14 July 2015
US 2015155180 A1
KR 20150064263 A
04 June 2015
11 June 2015
US 9632408 B1
25 April 2017
None
Name and mailing address of the ISA/:
National Intellectual Property Administration, PRC
6, Xitucheng Rd., Jimen Bridge, Haidian District, Beijing 100088
China
Facsimile No. (86-10)62019451
Date of the actual completion of the international search:
14 January 2019
Date of mailing of the international search report:
22 January 2019
Authorized officer:
TANG,Yuxi
Telephone No. 62411854
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