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1. (WO2019045673) DEFORMABLE COVERS ON SENSORS AND RESERVOIRS
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CLAIMS:

1 . A fluid device, comprising:

a substrate including a sense region;

a microfluidic channel structure formed in the substrate and including a first channel;

a sensor disposed in the sense region to lie above the microfluidic channel structure and adjacent to the first channel; and

a deformable cover disposed on the substrate to seal the sensor from contact with a fluid in the microfluidic channel structure and ambient conditions, the fluid to be fluidly coupled to the sensor when the deformable cover is deformed.

2. The device of claim 1 , further comprising:

a transparent region of the deformable cover disposed over at least a portion of the sensor.

3. The device of claim 1 , further comprising:

a transparent region of the substrate, the sensor being disposed at least partially in the transparent region.

4. The device of claim 1 , wherein the sensor is an optical sensor.

5. The device of claim 4, wherein the optical sensor is a SERS substrate.

6. The device of claim 1 , further comprising:

a second channel of the microfluidic channel structure to be fluidly coupled to the sensor.

7. A fluid device, comprising:

a substrate;

a sensor coupled to the substrate;

a reservoir formed in the substrate adjacent to the sensor; and

a deformable cover disposed to seal the sensor and the reservoir on the substrate.

8. The device of claim 7, wherein the reservoir and the sensor are disposed in separate compartments formed by the deformable cover.

9. The device of claim 7, wherein the reservoir is disposed to be fluidly coupled to the sensor.

10. The device of claim 7, wherein the deformable cover is to provide a gastight compartment for the sensor.

1 1 . The device of claim 7, further comprising:

a transparent portion of the deformable cover to be disposed over at least a portion of the sensor.

12. The device of claim 7, further comprising:

a transparent region of the substrate, the sensor disposed on the transparent region.

13. The device of claim 12, wherein the sensor is a SERS substrate.

14. A device, comprising:

a substrate including a transparent region;

a SERS substrate disposed at least partially in the transparent region;

a fluid reservoir formed in the substrate to be fluidly coupled to the SERS substrate; and

a deformable cover disposed to seal the SERS substrate from the fluid reservoir in an gastight compartment on the substrate.

15. The device of claim 14, further comprising:

a piercing member to pierce the deformable cover to fluidly couple the fluid reservoir with the SERS substrate.