WO2019005542 IMAGE IMPROVEMENT FOR ALIGNMENT THROUGH INCOHERENT ILLUMINATION BLENDING

이 애플리케이션의 일부 콘텐츠는 현재 사용할 수 없습니다.
이 상황이 계속되면 다음 주소로 문의하십시오

1. (WO2019005542) IMAGE IMPROVEMENT FOR ALIGNMENT THROUGH INCOHERENT ILLUMINATION BLENDING

국제사무국에 기록된 최신 서지정보

공개번호:	WO/2019/005542	국제출원번호:	PCT/US2018/038327
공개일:	03.01.2019	국제출원일:	19.06.2018

IPC:

G03F 7/20 (2006.01) ,G03F 9/00 (2006.01) ,H01L 21/027 (2006.01)

출원인:

APPLIED MATERIALS, INC. [US/US]; 3050 Bowers Avenue Santa Clara, California 95054, US

발명자:

COSKUN, Tamer; US

JEONG, Hwan J.; US

대리인:

PATTERSON, B. Todd; US

VERSTEEG, Steven H.; US

우선권 정보:

62/525,021

26.06.2017

발명의 명칭:

(EN) IMAGE IMPROVEMENT FOR ALIGNMENT THROUGH INCOHERENT ILLUMINATION BLENDING
(FR) AMÉLIORATION D'IMAGE POUR L'ALIGNEMENT PAR MÉLANGE D'ÉCLAIRAGES INCOHÉRENTS

요약서:

(EN) Methods and apparatuses are provided that determine an offset between actual feature/mark locations and the designed feature/mark locations in a maskless lithography system. For example, in one embodiment, a method is provided that includes opening a camera shutter in a maskless lithography system. Light is directed from a configuration of non-adjacent mirrors in a mirror array towards a first substrate layer. An image of the first substrate layer on a camera is captured and accumulated. Light is directed and images are captured repeatedly using different configurations of non-adjacent mirrors to cover an entire field-of-view (FOV) of the camera on the first substrate layer. Thereafter, the camera shutter is closed and the accumulated image is stored in memory.
(FR) L'invention concerne des procédés et des appareils qui déterminent un décalage entre des emplacements de caractéristiques/repères réels et les emplacements de caractéristiques/repères prédéfinis dans un système de lithographie sans masque. Par exemple, un mode de réalisation concerne un procédé qui comprend l'étape consistant à ouvrir l'obturateur d'une caméra dans un système de lithographie sans masque. Une lumière provenant d'une configuration de miroirs non adjacents d'un réseau de miroirs est dirigée sur une première couche de substrat. Une image de la première couche de substrat est capturée et accumulée sur une caméra. La lumière est dirigée et des images sont capturées de manière répétée à l'aide de différentes configurations de miroirs non adjacents afin de couvrir un champ de vision (FOV) complet de la caméra sur la première couche de substrat. L'obturateur de la caméra est ensuite refermé et l'image accumulée est enregistrée en mémoire.

지정국:

AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
아프리카지역 지식재산권기구(ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
유라시아 특허청 (AM, AZ, BY, KG, KZ, RU, TJ, TM)
유럽 특허청(EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)

공개언어:

영어 (EN)

출원언어:

영어 (EN)

기본 검색 유형	단순 고급검색 필드 조합 검색 주별 PCT 공개공보 교차 언어 검색 번역가
기본 탭 검색 유형	Front Page Any Field Full Text ID/Numbers IPC Names Dates
인터페이스 언어	English Deutsch Français Español 日本語中文 한국어 Português Русский
다중 윈도우 인터페이스
말풍선 도움말
IPC 말풍선 도움말
Instant Help
Expanded Query