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1. (WO2006120927) OPTICAL ELEMENT DRIVING APPARATUS, PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
국제사무국에 기록된 최신 서지정보   

공개번호:    WO/2006/120927    국제출원번호:    PCT/JP2006/308899
공개일: 16.11.2006 국제출원일: 27.04.2006
IPC:
H01L 21/027 (2006.01), G02B 7/02 (2006.01), G02B 13/24 (2006.01), G02B 17/00 (2006.01)
출원인: NIKON CORPORATION [JP/JP]; 2-3, Marunouchi 3-chome Chiyoda-ku, Tokyo 1008331 (JP) (For All Designated States Except US).
ISHIKAWA, Mitsuo [JP/JP]; (JP) (For US Only)
발명자: ISHIKAWA, Mitsuo; (JP)
대리인: ONDA, Hironori; 12-1, Ohmiya-cho 2-chome Gifu-shi, Gifu 5008731 (JP)
우선권 정보:
2005-134225 02.05.2005 JP
발명의 명칭: (EN) OPTICAL ELEMENT DRIVING APPARATUS, PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
(FR) APPAREIL DE COMMANDE D’ELEMENT OPTIQUE, SYSTEME OPTIQUE DE PROJECTION, APPAREIL D’EXPOSITION ET PROCEDE DE FABRICATION DE DISPOSITIF
(JA) 光学要素駆動装置、投影光学系、露光装置、及びデバイスの製造方法
요약서: front page image
(EN)An outer ring (21) is arranged in a lens tube unit (14c). A driving mechanism (25) provided on the outer ring shifts an optical element (M), and adjusts the position and the posture of the optical element. A damper mechanism (31) for suppressing propagation of vibration to the optical element is attached to the outer ring.
(FR)Selon l'invention, un anneau externe (21) est agencé dans une unité de tube de lentille (14c). Un mécanisme de commande (25) disposé sur l’anneau externe décale un élément optique (M) et règle la position et la posture de l’élément optique. Un mécanisme d’amortissement (31) pour supprimer la propagation de la vibration vers l’élément optique est fixé sur l’anneau externe.
(JA)鏡筒ユニット(14c)内にアウタリング(21)が配置される。アウタリングに設けられた駆動機構(25)は光学要素(M)を移動して、光学要素の位置と姿勢を調整する。振動が光学要素に伝播するのを抑制するダンパ機構(31)はアウタリングに取り付けられている。
지정국: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, LY, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
공개언어: Japanese (JA)
출원언어: Japanese (JA)