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1. (WO2006017163) VERSATILE SEMI-TOROIDAL PROCESSING FURNACE WITH AUTOMATIC AND RECONFIGURABLE WAFER EXCHANGE
국제사무국에 기록된 최신 서지정보   

공개번호: WO/2006/017163 국제출원번호: PCT/US2005/024237
공개일: 16.02.2006 국제출원일: 09.07.2005
IPC:
F26B 19/00 (2006.01) ,F27D 11/00 (2006.01)
F SECTION F — 기계공학; 조명; 가열; 무기; 폭파
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건조
B
고체원료 또는 고형물에서 액체를 제거하는 것에 의한 건조
19
9/00에서 17/00까지의 그룹에 속하지 않는 고체재료 또는 물체의 건조기계 및 장치
F SECTION F — 기계공학; 조명; 가열; 무기; 폭파
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노(Furnaces), 킬른(Kilns), 오븐(Ovens), 레토르트(Retorts)
D
노의 1종류 이상에서 볼 수 있는 것에 있어서의 노, 킬른, 오븐 또는 레토르트의 세부 또는 부속품
11
노내 또는 노에 부설하는 전기가열요소의 배치
출원인:
BAYNE, Christopher, J. [GB/US]; US (UsOnly)
DIAMOND SEMICONDUCTOR, INC. [US/US]; 16548 Oleander Avenue Los Gatos, CA 95032, US (AllExceptUS)
발명자:
BAYNE, Christopher, J.; US
대리인:
DORT, David, Bogart; Dort Close IP, PLLC Box 66148 Washington, DC 20035, US
우선권 정보:
10/889,30512.07.2004US
11/090,91726.03.2005US
발명의 명칭: (EN) VERSATILE SEMI-TOROIDAL PROCESSING FURNACE WITH AUTOMATIC AND RECONFIGURABLE WAFER EXCHANGE
(FR) FOUR DE TRAITEMENT SEMI-TOROIDAL POLYVALENT A ECHANGE DE PLAQUETTE AUTOMATIQUE ET RECONFIGURABLE
요약서:
(EN) The present invention comprises a fully automated, fabrication compliant furnace with the advantages of the horizontal most of the advantages of the vertical furnace. One embodiment of the present invention is that it implements a multi-degree motion robot arm to move wafers from a loading area to a WIP station where the wafer are then loaded into wafer boats on a rotating cantilever system or directly onto a specialized and reconfigurable paddle designed to hold wafers: The wafers may be loaded in the horizontal processing position as well as the vertical processing position. Multiple levels of the semi-toroidal horizontal processors allow for multiple batches of wafers to be loaded, processed, cooled, and unloaded by the robot arm. The present invention reduces the footprint of the traditional horizontal or vertical furnaces, increases capacity and throughput, and allows for direct tube transfer.
(FR) L'invention concerne un four conforme entièrement automatique, ayant les avantages du four horizontal et la plupart des avantages du four vertical. Selon une variante, on décrit un bras de robot à mouvement sur plusieurs degrés pour le déplacement de plaquettes depuis une zone de chargement vers un poste de passage temporaire en cours de production (WIP), où la plaquette est ensuite chargée dans des porte-plaquettes sur un système en porte-à-faux rotatif ou directement sur un support de plaquettes spécialisé et reconfigurable. On peut charger les plaquettes en position de traitement horizontale et en position de traitement verticale. Les niveaux multiples des processeurs horizontaux semi-toroïdaux permettent le chargement, le traitement, le refroidissement et le déchargement de plusieurs lots de plaquettes, via le bras de robot. On réduit ainsi l'empreinte des fours horizontaux et verticaux classiques, en augmentant la capacité et le débit, et en permettant un transfert de tube direct.
front page image
지정국: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW
아프리카지역 지식재산권기구(ARIPO) (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
유라시아 특허청 (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
유럽 특허청(EPO) (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
공개언어: 영어 (EN)
출원언어: 영어 (EN)