국제 및 국내 특허문헌 검색

1. (WO2002019441) PIEZOACTUATOR AND A METHOD FOR PRODUCING A PIEZOACTUATOR

Pub. No.:    WO/2002/019441    International Application No.:    PCT/DE2001/002520
Publication Date: Fri Mar 08 00:59:59 CET 2002 International Filing Date: Sat Jul 07 01:59:59 CEST 2001
IPC: H01L 41/053
H01L 41/083
H01L 41/09
H01L 41/273
H01L 41/335
H02N 2/04
Applicants: SIEMENS AKTIENGESELLSCHAFT
LUBITZ, Karl
SCHUH, Carsten
Inventors: LUBITZ, Karl
SCHUH, Carsten
Title: PIEZOACTUATOR AND A METHOD FOR PRODUCING A PIEZOACTUATOR
Abstract:
The invention relates to a piezoactuator (1) comprising a piezoelectric body (4) and elements for pre-tensioning the piezoelectric body, consisting of a first (2) and a second (3) connecting element for transferring forces to the piezoelectric body (4). The actuator is provided with an element (6) for transferring tensile/pressure forces between the connecting elements (2, 3), said element being at least partially located in a gap (5) in the form of a bore in the piezoelectric body (4). According to the invention, the piezoactuator (1) is set to a defined working curve using the pre-tensioning elements (2, 3, 6). The piezoelectric body (4) is preferably produced by the lamination of piezoelectric layers, into which a gap is drilled after lamination and the component is subsequently sintered.