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1. KR1020070106169 - SUSCEPTOR AND A METHOD FOR FABRICATING THE SAME TO AVOID GENERATION OF WELDING FUME

官庁 大韓民国
出願番号 1020060038732
出願日 28.04.2006
公開番号 1020070106169
公開日 01.11.2007
特許番号 1007957560000
特許付与日 21.01.2008
公報種別 B1
IPC
H01L 21/683
H電気
01基本的電気素子
L半導体装置,他に属さない電気的固体装置
21半導体装置または固体装置またはそれらの部品の製造または処理に特に適用される方法または装置
67製造または処理中の半導体または電気的固体装置の取扱いに特に適用される装置;半導体または電気的固体装置もしくは構成部品の製造または処理中のウエハの取扱いに特に適用される装置
683支持または把持のためのもの
CPC
H01L 21/68785
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
683for supporting or gripping
687using mechanical means, e.g. chucks, clamps or pinches
68714the wafers being placed on a susceptor, stage or support
68785characterised by the mechanical construction of the susceptor, stage or support
H01L 21/67098
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
67005Apparatus not specifically provided for elsewhere
67011Apparatus for manufacture or treatment
67098Apparatus for thermal treatment
H01L 21/68757
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
683for supporting or gripping
687using mechanical means, e.g. chucks, clamps or pinches
68714the wafers being placed on a susceptor, stage or support
68757characterised by a coating or a hardness or a material
G02F 1/1303
GPHYSICS
02OPTICS
FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
1Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics
01for the control of the intensity, phase, polarisation or colour 
13based on liquid crystals, e.g. single liquid crystal display cells
1303Apparatus specially adapted to the manufacture of LCDs
出願人 ENTROPY CO., LTD.
(주)엔트로피
発明者 LEE, YOUNG CHUL
이영철
KIM, MUN HWAN
김문환
KIM, JONG SEO
김종서
代理人 특허법인 율촌
発明の名称
(EN) SUSCEPTOR AND A METHOD FOR FABRICATING THE SAME TO AVOID GENERATION OF WELDING FUME
(KO) 서셉터 및 서셉터의 제조방법
要約
(EN)
PURPOSE: A method for fabricating a susceptor is provided to prevent basically the generation of a defect like thermal crack caused by solidification of aluminum alloy in a welding portion by incorporating a susceptor body and a cover by a friction stir welding method. CONSTITUTION: A groove is formed in the bottom surface of a susceptor body(S41). A heater is received in the groove(S42). A susceptor shaft is connected to the susceptor body to extend the heater to the outside. A cover is incorporated in the susceptor body by a friction stir welding method(S44). The cover includes a first cover in contact with the heater and a second cover in contact with the first cover such that the second cover has a portion welded to the susceptor body. ©KIPO 2008

(KO)
본 발명은 서셉터 및 그 제조 방법에 관한 것으로, 보다 상세하게는 액정 표시 장치용 공정 챔버 내부에 설치되며 내부에 히터가 매설되는 서셉터 및 그 제조 방법에 관한 것이다.