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1. WO2019073823 - ポッドオープナー

公開番号 WO/2019/073823
公開日 18.04.2019
国際出願番号 PCT/JP2018/036321
国際出願日 28.09.2018
IPC
H01L 21/677 2006.1
H電気
01基本的電気素子
L半導体装置,他に属さない電気的固体装置
21半導体装置または固体装置またはそれらの部品の製造または処理に特に適用される方法または装置
67製造または処理中の半導体または電気的固体装置の取扱いに特に適用される装置;半導体または電気的固体装置もしくは構成部品の製造または処理中のウエハの取扱いに特に適用される装置
677移送のためのもの,例.異なるワ―クステーション間での移送
H01L 21/673 2006.1
H電気
01基本的電気素子
L半導体装置,他に属さない電気的固体装置
21半導体装置または固体装置またはそれらの部品の製造または処理に特に適用される方法または装置
67製造または処理中の半導体または電気的固体装置の取扱いに特に適用される装置;半導体または電気的固体装置もしくは構成部品の製造または処理中のウエハの取扱いに特に適用される装置
673特に適合するキャリアを使用するもの
CPC
B65G 47/91
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
47Article or material-handling devices associated with conveyors; Methods employing such devices
74Feeding, transfer, or discharging devices of particular kinds or types
90Devices for picking-up and depositing articles or materials
91incorporating pneumatic, e.g. suction, grippers
B67B 7/12
BPERFORMING OPERATIONS; TRANSPORTING
67OPENING, CLOSING ; OR CLEANING; BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
BAPPLYING CLOSURE MEMBERS TO BOTTLES JARS, OR SIMILAR CONTAINERS; OPENING CLOSED CONTAINERS
7Hand- or power-operated devices for opening closed containers
12for removing disc-closures
B67B 7/20
BPERFORMING OPERATIONS; TRANSPORTING
67OPENING, CLOSING ; OR CLEANING; BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
BAPPLYING CLOSURE MEMBERS TO BOTTLES JARS, OR SIMILAR CONTAINERS; OPENING CLOSED CONTAINERS
7Hand- or power-operated devices for opening closed containers
20for breaking vacuum seals between lids or covers and bodies of preserving jars, e.g. by wedge action
H01L 21/67201
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
67005Apparatus not specifically provided for elsewhere
67011Apparatus for manufacture or treatment
67155Apparatus for manufacturing or treating in a plurality of work-stations
67201characterized by the construction of the load-lock chamber
H01L 21/67346
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
673using specially adapted carriers ; or holders; Fixing the workpieces on such carriers or holders
67346characterized by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports
H01L 21/67379
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
673using specially adapted carriers ; or holders; Fixing the workpieces on such carriers or holders
6735Closed carriers
67379characterised by coupling elements, kinematic members, handles or elements to be externally gripped
出願人
  • ローツェ株式会社 RORZE CORPORATION [JP]/[JP]
発明者
  • 坂田 勝則 SAKATA, Katsunori
代理人
  • 松下 亮 MATSUSHITA, Makoto
優先権情報
2017-19791811.10.2017JP
公開言語 (言語コード) 日本語 (ja)
出願言語 (言語コード) 日本語 (JA)
指定国 (国コード)
発明の名称
(EN) POD OPENER
(FR) DISPOSITIF D'OUVERTURE DE CONTENEUR
(JA) ポッドオープナー
要約
(EN) Provided is an inexpensive pod opener that opens the door of a container and that places cassettes arranged in a stacked manner inside the container into a state where the cassettes can be accessed by fingers of a transportation robot. A pod opener according to the present invention is provided with: an elevating mechanism for moving a cassette up and down in the vertical direction; a first hook member that engages with an engagement means provided in the cassette and that supports the cassette; a second hook member supported by the first hook member; an advancing/retracting mechanism for advancing and retracting the first hook member and the second hook member relative to the cassette; a biasing member for biasing the second hook member upward; and an atmosphere-maintaining device for maintaining an inner space in which the cassette is disposed at a prescribed atmosphere. The second hook member is configured to be displaceable relative to the first hook member.
(FR) L'invention concerne un dispositif d'ouverture de conteneur peu coûteux qui ouvre la porte d'un conteneur et place des cassettes disposées de façon empilée dans un conteneur dans un état où les doigts d'un robot de transport peuvent accéder aux cassettes. Selon la présente invention, un dispositif d'ouverture de conteneur comprend : un mécanisme d'élévation servant à déplacer une cassette vers le haut et vers le bas dans le sens vertical ; un premier élément crochet qui vient en prise avec un moyen de mise en prise placé dans la cassette et qui maintient la cassette ; un second élément crochet maintenu par le premier élément crochet ; un mécanisme d'avancement/de rétraction servant à faire avancer et rétracter les premier et second éléments crochet par rapport à la cassette ; un élément de sollicitation servant à solliciter le second élément de crochet vers le haut ; et un dispositif de maintien d'atmosphère servant à maintenir à une atmosphère prescrite un espace interne dans lequel la cassette est placée. Le second élément crochet est conçu de façon à pouvoir se déplacer par rapport au premier élément crochet.
(JA) 容器を開扉して、容器内部に積み重ねて配置されるカセットを搬送ロボットのフィンガがアクセス可能な状態にするポッドオープナーを安価に提供する。本発明のポッドオープナーは、カセットを鉛直方向に昇降移動させる昇降機構と、カセットが備える係合手段と係合して、前記カセットを支持する第1のフック部材と、第1のフック部材によって支持される第2のフック部材と、第1のフック部材と第2のフック部材とをカセットに対して前進及び後退移動させる進退機構と、第2のフック部材を上方へ付勢する付勢部材と、カセットが配置される内部空間を所定の雰囲気に維持する雰囲気維持装置とを備え、第2のフック部材は第1のフック部材に対して変位可能に構成する。
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