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1. (WO2019067444) SYSTEMS AND METHODS FOR TREATING SUBSTRATES WITH CRYOGENIC FLUID MIXTURES



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INTERNATIONAL SEARCH REPORT (ISR)
Part 1:  1  2  3  4  5  6          Part 2:  A  B  C  D  E 
International application No. Applicant's or agent's file reference
PCT/US2018/052643 TEF2031WO2
International filing date (day/month/year) (Earliest) Priority Date (day/month/year)
25 September 2018 29 September 2017
Applicant
TEL FSI, INC.
FOR FURTHER ACTION: See Form PCT/ISA/220 as well as, where applicable, item 5 below.
This international search report has been prepared by this International Searching Authority and is transmitted to the applicant according to Article 18. A copy is being transmitted to the International Bureau.
It is also accompanied by a copy of each prior art document cited in this report.
1. Basis of the report
a. With regard to the language, the international search was carried out on the basis of:
the international application in the language in which it was filed.
a translation of the international application into                                          which is the language of a translation furnished for the purposes of international search (Rules 12.3(a) and 23.1(b)).
b.
This international search report has been established taking into account the rectification of an obvious mistake authorized by or notified to this Authority under Rule 91 (Rule 43.6bis(a)).
c.
With regard to any nucleotide and/or amino acid sequence disclosed in the international application, the international search was carried out on the basis of a sequence listing:
2. Certain claims were found unsearchable
3. Unity of invention is lacking
4. Title of the invention
The text is approved as submitted by the applicant.
The text has been established by this Authority to read as follows:
5. Abstract
The text is approved as submitted by the applicant.
The text has been established, according to Rule 38.2, by this Authority as it appears in Box No. IV. The applicant may, within one month from the date of mailing of this international search report, submit comments to this Authority.
6. Drawings
a.
The figure of the drawings to be published with the abstract is Figure No.     1    
as suggested by the applicant.
as selected by this Authority, because the applicant failed to suggest a figure.
as selected by this Authority, because this figure better characterizes the invention.
b.
none of the figures is to be published with the abstract.

A. CLASSIFICATION OF SUBJECT MATTER

     H01L 21/02 (2006.01)i; H01L 21/67 (2006.01)i
According to International Patent Classification (IPC) or to both national classification and IPC

B. FIELDS SEARCHED

Minimum documentation searched (classification system followed by classification symbols):
     H01L
Documentation searched other than minimum documentation to the extent that such documents are included in the fields searched:
Electronic data base consulted during the international search (name of data base and, where practicable, search terms used):
EPO-Internal, WPI Data

C. DOCUMENTS CONSIDERED TO BE RELEVANT

Category* Citation of document, with indication, where appropriate, of the relevant passages Relevant to claim No.
(1)
X
US 2016303617 A1 (MBANASO CHIMAOBI W [US] ET AL) 20 October 2016 (2016-10-20)
1-19
abstract
claims 1-20
figures 1-15
(2)
A
US 2016096210 A1 (BUTTERBAUGH JEFFERY W [US] ET AL) 07 April 2016 (2016-04-07)
1-19
abstract
claims 1-24
figures 1-15
(3)
A
US 5209028 A (MCDERMOTT WAYNE T [US] ET AL) 11 May 1993 (1993-05-11)
1-19
abstract
claims 1-22
figures 1-5B
(4)
A
US 5062898 A (MCDERMOTT WAYNE T [US] ET AL) 05 November 1991 (1991-11-05)
1-19
abstract
claims 1-17
figure 1
*
Special categories of cited documents:
"A"
document defining the general state of the art which is not considered to be of particular relevance
"E"
earlier application or patent but published on or after the international filing date
"L"
document which may throw doubts on priority claim(s) or which is cited to establish the publication date of another citation or other special reason (as specified)
"O"
document referring to an oral disclosure, use, exhibition or other means
"P"
document published prior to the international filing date but later than the priority date claimed
"T"
later document published after the international filing date or priority date and not in conflict with the application but cited to understand the principle or theory underlying the invention
"X"
document of particular relevance; the claimed invention cannot be considered novel or cannot be considered to involve an inventive step when the document is taken alone
"Y"
document of particular relevance; the claimed invention cannot be considered to involve an inventive step when the document is combined with one or more other such documents, such combination being obvious to a person skilled in the art
"&"
document member of the same patent family

D. INFORMATION ON PATENT FAMILY MEMBERS

Patent document cited in search report Publication date
(day/month/year)
Patent family member(s) Publication date
(day/month/year)
US 2016303617 A1
20 October 2016
US 2016303617 A1
US 2018308720 A1
20 October 2016
25 October 2018
US 2016096210 A1
07 April 2016
JP 2016076702 A
JP 2016076703 A
JP 2016076704 A
JP 2016086157 A
KR 20160041020 A
KR 20160041021 A
KR 20160041022 A
KR 20160041023 A
TW 201624533 A
TW 201624534 A
TW 201624535 A
TW 201625362 A
US 2016096206 A1
US 2016096207 A1
US 2016096209 A1
US 2016096210 A1
WO 2016057524 A1
12 May 2016
12 May 2016
12 May 2016
19 May 2016
15 April 2016
15 April 2016
15 April 2016
15 April 2016
01 July 2016
01 July 2016
01 July 2016
16 July 2016
07 April 2016
07 April 2016
07 April 2016
07 April 2016
14 April 2016
US 5209028 A
11 May 1993
NONE
US 5062898 A
05 November 1991
CA 2043445 A1
DE 69112913 D1
DE 69112913 T2
EP 0461476 A2
IE 911891 A1
JP H081900 B2
JP H04230030 A
KR 940001024 B1
US 5062898 A
06 December 1991
19 October 1995
08 February 1996
18 December 1991
18 December 1991
10 January 1996
19 August 1992
08 February 1994
05 November 1991
Name and mailing address of the ISA/:
European Patent Office
P.B. 5818, Patentlaan 2, 2280 HV Rijswijk,
Netherlands
Telephone No. (+31-70)340-2040
Facsimile No. (+31-70)340-3016
Date of the actual completion of the international search:
04 December 2018
Date of mailing of the international search report:
12 December 2018
Authorized officer:
Lachaud, Stéphane
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