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1. (WO2019066855) INTERCONNECTS HAVING A PORTION WITHOUT A LINER MATERIAL AND RELATED STRUCTURES, DEVICES, AND METHODS



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INTERNATIONAL SEARCH REPORT (ISR)
Part 1:  1  2  3  4  5  6          Part 2:  A  B  C  D  E 
International application No. Applicant's or agent's file reference
PCT/US2017/054018 P120853PCT
International filing date (day/month/year) (Earliest) Priority Date (day/month/year)
28 September 2017
Applicant
INTEL CORPORATION
FOR FURTHER ACTION: See Form PCT/ISA/220 as well as, where applicable, item 5 below.
This international search report has been prepared by this International Searching Authority and is transmitted to the applicant according to Article 18. A copy is being transmitted to the International Bureau.
It is also accompanied by a copy of each prior art document cited in this report.
1. Basis of the report
a. With regard to the language, the international search was carried out on the basis of:
the international application in the language in which it was filed.
a translation of the international application into                                          which is the language of a translation furnished for the purposes of international search (Rules 12.3(a) and 23.1(b)).
b.
This international search report has been established taking into account the rectification of an obvious mistake authorized by or notified to this Authority under Rule 91 (Rule 43.6bis(a)).
c.
With regard to any nucleotide and/or amino acid sequence disclosed in the international application, the international search was carried out on the basis of a sequence listing:
2. Certain claims were found unsearchable
3. Unity of invention is lacking
4. Title of the invention
The text is approved as submitted by the applicant.
The text has been established by this Authority to read as follows:
5. Abstract
The text is approved as submitted by the applicant.
The text has been established, according to Rule 38.2, by this Authority as it appears in Box No. IV. The applicant may, within one month from the date of mailing of this international search report, submit comments to this Authority.
6. Drawings
a.
The figure of the drawings to be published with the abstract is Figure No.     1    
as suggested by the applicant.
as selected by this Authority, because the applicant failed to suggest a figure.
as selected by this Authority, because this figure better characterizes the invention.
b.
none of the figures is to be published with the abstract.

A. CLASSIFICATION OF SUBJECT MATTER

     H01L 21/768 (2006.01)i
According to International Patent Classification (IPC) or to both national classification and IPC

B. FIELDS SEARCHED

Minimum documentation searched (classification system followed by classification symbols):
Documentation searched other than minimum documentation to the extent that such documents are included in the fields searched:
Korean utility models and applications for utility modelsJapanese utility models and applications for utility models
Electronic data base consulted during the international search (name of data base and, where practicable, search terms used):
eKOMPASS(KIPO internal) & Keywords: integrated circuit, interlayer dielectric, interconnect, conductive material, liner, hardmask

C. DOCUMENTS CONSIDERED TO BE RELEVANT

Category* Citation of document, with indication, where appropriate, of the relevant passages Relevant to claim No.
(1)
X
US 2014-0264864 A1 (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED) 18 September 2014 See paragraphs [0020]-[0027] and figures 6-12.
1
A
2-23
(2)
A
US 2016-0197013 A1 (INTERNATIONAL BUSINESS MACHINES CORPORATION) 07 July 2016 See paragraphs [0015]-[0022] and figures 1-3.
1-23
(3)
A
US 9455403 B1 (MACRONIX INTERNATIONAL CO., LTD.) 27 September 2016 See column 2, line 42 - column 4, line 41 and figure 1.
1-23
(4)
A
KR 10-2016-0014558 A (SAMSUNG ELECTRONICS CO., LTD.) 11 February 2016 See paragraphs [0051]-[0059] and figuers 1a-1g.
1-23
(5)
A
EP 3034655 A1 (ATOTECH DEUTSCHLAND GMBH) 22 June 2016 See paragraphs [0025]-[0054] and figure 2.
1-23
*
Special categories of cited documents:
"A"
document defining the general state of the art which is not considered to be of particular relevance
"E"
earlier application or patent but published on or after the international filing date
"L"
document which may throw doubts on priority claim(s) or which is cited to establish the publication date of another citation or other special reason (as specified)
"O"
document referring to an oral disclosure, use, exhibition or other means
"P"
document published prior to the international filing date but later than the priority date claimed
"T"
later document published after the international filing date or priority date and not in conflict with the application but cited to understand the principle or theory underlying the invention
"X"
document of particular relevance; the claimed invention cannot be considered novel or cannot be considered to involve an inventive step when the document is taken alone
"Y"
document of particular relevance; the claimed invention cannot be considered to involve an inventive step when the document is combined with one or more other such documents, such combination being obvious to a person skilled in the art
"&"
document member of the same patent family

D. INFORMATION ON PATENT FAMILY MEMBERS

Patent document cited in search report Publication date
(day/month/year)
Patent family member(s) Publication date
(day/month/year)
US 2014-0264864 A1
18 September 2014
US 8951909 B2
10 February 2015
US 2016-0197013 A1
07 July 2016
US 2016-0197038 A1
US 2016-0163587 A1
07 July 2016
09 June 2016
US 9455403 B1
27 September 2016
None
KR 10-2016-0014558 A
11 February 2016
US 2016-0035675 A1
US 9613907 B2
04 February 2016
04 April 2017
EP 3034655 A1
22 June 2016
TW 201631207 A
WO 2016-096390 A1
01 September 2016
23 June 2016
Name and mailing address of the ISA/:
Korean Intellectual Property Office
189 Cheongsa-ro, Seo-gu, Daejeon Metropolitan City, 302-701
Republic of Korea
Facsimile No. +82-42-481-8578
Date of the actual completion of the international search:
21 June 2018
Date of mailing of the international search report:
21 June 2018
Authorized officer:
PARK, Hye Lyun
Telephone No. +82-42-481-3463
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