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1. (WO2017182558) METHOD FOR DETECTING THE POSITION OF A MASK HOLDER ON A MEASURING TABLE

Pub. No.:    WO/2017/182558    International Application No.:    PCT/EP2017/059370
Publication Date: Fri Oct 27 01:59:59 CEST 2017 International Filing Date: Fri Apr 21 01:59:59 CEST 2017
IPC: G03F 7/20
G01B 11/03
G03F 1/84
H01L 21/67
G01N 21/956
Applicants: CARL ZEISS SMT GMBH
Inventors: SOLOWAN, Hans-Michael
Title: METHOD FOR DETECTING THE POSITION OF A MASK HOLDER ON A MEASURING TABLE
Abstract:
The invention relates to a method for detecting the position of a mask holder (1) for masks (2) for photolithography, comprising the following steps: Positioning the mask holder (1) with masks (2) on a measuring table of a measuring device; measuring the mask holder (1) by means of an algorithm; recording the absolute position of the mask holder (1) on the measuring table and capturing and recording at least one reference image.