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1. WO2016199288 - 中継装置及び製造システム

公開番号 WO/2016/199288
公開日 15.12.2016
国際出願番号 PCT/JP2015/066982
国際出願日 12.06.2015
IPC
H01L 21/02 2006.1
H電気
01基本的電気素子
L半導体装置,他に属さない電気的固体装置
21半導体装置または固体装置またはそれらの部品の製造または処理に特に適用される方法または装置
02半導体装置またはその部品の製造または処理
CPC
G05B 19/4155
GPHYSICS
05CONTROLLING; REGULATING
BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
19Programme-control systems
02electric
18Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
4155characterised by programme execution, i.e. part programme or machine function execution, e.g. selection of a programme
G05B 19/4185
GPHYSICS
05CONTROLLING; REGULATING
BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
19Programme-control systems
02electric
418Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
4185characterised by the network communication
G05B 2219/31174
GPHYSICS
05CONTROLLING; REGULATING
BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
2219Program-control systems
30Nc systems
31From computer integrated manufacturing till monitoring
31174Load, use different protocols, formats, emulators for different systems
G05B 2219/31186
GPHYSICS
05CONTROLLING; REGULATING
BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
2219Program-control systems
30Nc systems
31From computer integrated manufacturing till monitoring
31186TCP-IP internet protocol
G05B 2219/31202
GPHYSICS
05CONTROLLING; REGULATING
BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
2219Program-control systems
30Nc systems
31From computer integrated manufacturing till monitoring
31202Semiconductor equipment communication standard SECS
H01L 21/02
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
02Manufacture or treatment of semiconductor devices or of parts thereof
出願人
  • 富士機械製造株式会社 FUJI MACHINE MFG. CO., LTD. [JP]/[JP]
発明者
  • 清水 浩二 SHIMIZU, Koji
代理人
  • 特許業務法人ネクスト NEXT INTERNATIONAL
優先権情報
公開言語 (言語コード) 日本語 (ja)
出願言語 (言語コード) 日本語 (JA)
指定国 (国コード)
発明の名称
(EN) RELAY DEVICE AND MANUFACTURING SYSTEM
(FR) DISPOSITIF DE RELAIS ET SYSTÈME DE FABRICATION
(JA) 中継装置及び製造システム
要約
(EN) Provided are a relay device and a manufacturing system which relay communications complying with SECS/GEM protocol to a manufacturing system based on another communication protocol, so as to enable integral management by a SECS/GEM host. The relay device 19 executes protocol conversion between SECS/GEM protocol and a non-SECS/GEM, independent protocol to transfer data transmitted between a user host 17 and a manufacturer host 11 or the like. The relay device 19 also performs a transfer process on the basis of a port correspondence database in which a local IP address of the manufacturer host 11 or the like and a corresponding port number of TCP protocol are set.
(FR) L'invention concerne un dispositif de relais et un système de fabrication, lequel relaye des communications conformes au protocole SECS/GEM à un système de fabrication sur la base d'un autre protocole de communication, de manière à permettre la gestion intégrale par un hôte SECS/GEM. Le dispositif de relais (19) exécute une conversion de protocole entre le protocole SECS/GEM et un protocole indépendant non SECS/GEM pour transférer les données transmises entre un hôte d'utilisateur (17) et un hôte de fabricant (11) ou similaire. Le dispositif de relais (19) effectue également un processus de transfert en se basant sur une base de données de correspondance de port dans laquelle sont définis une adresse IP locale de l'hôte de fabricant (11) ou similaire et un numéro de port correspondant de protocole TCP.
(JA) SECS/GEMプロトコルに準拠した通信を、別の通信プロトコルの製造システムに中継し、SECS/GEMホストによる統括的な管理を可能とする中継装置及び製造システムを提供すること。 中継装置19は、SECS/GEMプロトコルと非SECS/GEMの独自プロトコルとのプロトコル変換を実行してユーザホスト17とメーカホスト11等との間で伝送されるデータの転送を行う。また、中継装置19は、メーカホスト11等のローカルIPアドレスと、それに対応するTCPプロトコルのポート番号とを設定したポート対応データベースに基づいて、転送処理を実行する。
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