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1. WO2015025410 - 基板収納容器

公開番号 WO/2015/025410
公開日 26.02.2015
国際出願番号 PCT/JP2013/072471
国際出願日 22.08.2013
予備審査請求日 27.05.2014
IPC
B65D 85/86 2006.01
B処理操作;運輸
65運搬;包装;貯蔵;薄板状または線条材料の取扱い
D物品または材料の貯蔵または輸送用の容器,例.袋,樽,びん,箱,缶,カートン,クレート,ドラム缶,広口びん,タンク,ホッパー,運送コンテナ;付属品,閉鎖具,または閉鎖具のための付属品;包装要素;包装体
85特定の物品または材料に特に適合する容器,包装要素または包装体
86電気部品用
H01L 21/673 2006.01
H電気
01基本的電気素子
L半導体装置,他に属さない電気的固体装置
21半導体装置または固体装置またはそれらの部品の製造または処理に特に適用される方法または装置
67製造または処理中の半導体または電気的固体装置の取扱いに特に適用される装置;半導体または電気的固体装置もしくは構成部品の製造または処理中のウエハの取扱いに特に適用される装置
673特に適合するキャリアを使用するもの
CPC
B65D 2585/86
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
DCONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
2585Containers, packaging elements or packages specially adapted for particular articles or materials
68for machines, engines, or vehicles in assembled or dismantled form
86for electrical components
H01L 21/67373
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
673using specially adapted carriers ; or holders; Fixing the workpieces on such carriers or holders
6735Closed carriers
67373characterised by locking systems
H01L 21/67379
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
673using specially adapted carriers ; or holders; Fixing the workpieces on such carriers or holders
6735Closed carriers
67379characterised by coupling elements, kinematic members, handles or elements to be externally gripped
H01L 21/67386
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
673using specially adapted carriers ; or holders; Fixing the workpieces on such carriers or holders
6735Closed carriers
67386characterised by the construction of the closed carrier
H01L 21/67393
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
673using specially adapted carriers ; or holders; Fixing the workpieces on such carriers or holders
6735Closed carriers
67389characterised by atmosphere control
67393characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl
出願人
  • ミライアル株式会社 MIRAIAL CO., LTD. [JP/JP]; 東京都豊島区東池袋1丁目24番1号 24-1, Higashi-Ikebukuro 1-chome, Toshima-ku, Tokyo 1700013, JP
発明者
  • 重田 純江 SHIGETA, Sumie; JP
  • 上野 貴之 UENO, Takayuki; JP
  • 福島 昌太 FUKUSHIMA, Shota; JP
代理人
  • 正林 真之 SHOBAYASHI, Masayuki; 東京都千代田区丸の内1-7-12 サピアタワー Sapia Tower, 1-7-12, Marunouchi, Chiyoda-ku, Tokyo 1000005, JP
優先権情報
公開言語 (言語コード) 日本語 (JA)
出願言語 (言語コード) 日本語 (JA)
指定国 (国コード)
発明の名称
(EN) SUBSTRATE STORING CONTAINER
(FR) RÉCEPTACLE DE STOCKAGE DE SUBSTRAT
(JA) 基板収納容器
要約
(EN)
A substrate storing container (1) stores substrates configured from semiconductor wafers, and is transported in a state wherein the whole substrate storing container is stored in a hermetically-sealed container storing bag. The substrate storing container is provided with a container main body (2), a cover body, and an exterior component (5). The container main body (2) has a main body inner surface that forms a substrate storing space in which a plurality of substrates can be stored, and an opening circumferential end section having a container main body opening formed therein, said container main body opening communicating with the substrate storing space. The cover body (3) is provided with a cover body main body having a cover body inner surface and a cover body outer surface, and is attachable/detachable with respect to the opening circumferential end section, and is capable of closing the container main body opening, and the cover body inner surface forms the substrate storing space with the main body inner surface when the cover body is closing the container main body opening. The exterior component (5) is attached to container main body (2) portions excluding the main body inner surface and/or cover body main body portions excluding the cover body inner surface. The exterior component (5) is annealed.
(FR)
Selon l'invention, un réceptacle de stockage de substrat (1) qui stocke des substrats constitués d'une tranche semi-conductrice, et les transporte dans un état de stockage dans un sachet de stockage de réceptacle complétement fermé de manière hermétique, est équipé d'un corps principal de réceptacle (2), d'un corps de couvercle (3), et d'un composant enveloppe externe (5). Le corps principal de réceptacle (2) possède : une face interne de corps principal qui forme un espace de stockage de substrat permettant de stocker une pluralité de substrats; et une partie bord périphérique d'ouverture dans laquelle est formée une partie ouverture de corps principal de réceptacle communiquant avec l'espace de stockage de substrat. Le corps de couvercle (3) est équipé d'un corps principal de couvercle possédant une face interne de couvercle et une face externe de couvercle, est amovible vis-à-vis de la partie bord périphérique d'ouverture et permet la fermeture de la partie ouverture de corps principal de réceptacle, et en mode fermeture de la partie ouverture de corps principal de réceptacle, sa face interne de couvercle forme avec la face interne de corps principal, l'espace de stockage de substrat. Le composant enveloppe externe (5) est monté sur une portion corps principal de réceptacle (2) en dehors de la face interne de corps principal et/ou sur une portion corps principal de couvercle en dehors de la face interne de couvercle. Un traitement de recuit est exécuté sur le composant enveloppe externe (5).
(JA)
 半導体ウェーハからなる基板を収納して、全体が密閉された容器収容袋に収容された状態で輸送される基板収納容器1は、容器本体2と、蓋体と、外装部品5と、を備える。容器本体2は、複数の基板を収納可能な基板収納空間を形成する本体内面と、基板収納空間に連通する容器本体開口部が形成された開口周縁部と、を有する。蓋体3は、蓋体内面と蓋体外面とを有する蓋体本体を備え、開口周縁部に対して着脱可能であり容器本体開口部を閉塞可能であり、容器本体開口部を閉塞しているときに、蓋体内面が本体内面と共に基板収納空間を形成する。外装部品5は、本体内面以外の容器本体2の部分、蓋体内面以外の蓋体本体の部分、のうちの少なくとも1つに装着される。外装部品5には、アニール処理が施されている。
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