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1. WO2014119198 - レーザ装置及び極端紫外光生成装置

公開番号 WO/2014/119198
公開日 07.08.2014
国際出願番号 PCT/JP2013/084695
国際出願日 25.12.2013
IPC
H01S 3/10 2006.01
H電気
01基本的電気素子
S光を増幅または生成するために,放射の誘導放出による光増幅を用いた装置;光領域以外の電磁放射の誘導放出を用いた装置
3レーザ,すなわち赤外線,可視光または紫外線領域での電磁放射の誘導放出を用いた装置
10放出された放射線の強度,周波数,位相,偏光または方向の制御,例.スイッチング,ゲート,変調または復調
H01S 3/00 2006.01
H電気
01基本的電気素子
S光を増幅または生成するために,放射の誘導放出による光増幅を用いた装置;光領域以外の電磁放射の誘導放出を用いた装置
3レーザ,すなわち赤外線,可視光または紫外線領域での電磁放射の誘導放出を用いた装置
H01S 3/23 2006.01
H電気
01基本的電気素子
S光を増幅または生成するために,放射の誘導放出による光増幅を用いた装置;光領域以外の電磁放射の誘導放出を用いた装置
3レーザ,すなわち赤外線,可視光または紫外線領域での電磁放射の誘導放出を用いた装置
23H01S3/02~3/14に分類されない2個以上のレーザの配列,例.分離された活性媒質の直列配列
CPC
G02F 1/0136
GPHYSICS
02OPTICS
FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
1Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
01for the control of the intensity, phase, polarisation or colour 
0136for the control of polarisation, e.g. state of polarisation [SOP] control, polarisation scrambling, TE-TM mode conversion or separation
G02F 1/09
GPHYSICS
02OPTICS
FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
1Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
01for the control of the intensity, phase, polarisation or colour 
09based on magneto-optical elements, e.g. exhibiting Faraday effect
H01S 2301/02
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
2301Functional characteristics
02ASE (amplified spontaneous emission), noise; Reduction thereof
H01S 3/005
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
3Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
005Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
H01S 3/0078
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
3Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
005Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
0078Frequency filtering
H01S 3/0085
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
3Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
005Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
0085Modulating the output, i.e. the laser beam is modulated outside the laser cavity
出願人
  • ギガフォトン株式会社 GIGAPHOTON INC. [JP]/[JP]
発明者
  • 菅沼 崇 SUGANUMA, Takashi
  • 鈴木 徹 SUZUKI, Toru
  • 藤巻 貴久 FUJIMAKI, Takahisa
  • 黒澤 義明 KUROSAWA, Yoshiaki
代理人
  • 特許業務法人つばさ国際特許事務所 TSUBASA PATENT PROFESSIONAL CORPORATION
優先権情報
2013-01727131.01.2013JP
公開言語 (言語コード) 日本語 (JA)
出願言語 (言語コード) 日本語 (JA)
指定国 (国コード)
発明の名称
(EN) LASER DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATING DEVICE
(FR) DISPOSITIF LASER ET DISPOSITIF DE GÉNÉRATION DE LUMIÈRE ULTRAVIOLETTE EXTRÊME
(JA) レーザ装置及び極端紫外光生成装置
要約
(EN)
It would be permissible for a laser device to comprise: a master oscillator which emits a pulse laser beam; amplifiers which are positioned upon the beam path of the pulse laser beam and which amplify the pulse laser beam; and wavelength filters which are positioned upon the beam path of the pulse laser beam between the master oscillator and the amplifiers, which transmit the pulse laser beam, and which suppress the transmission of light of wavelengths other than the wavelength of the pulse laser beam.
(FR)
La présente invention concerne un dispositif laser qui comprend : un oscillateur maître qui émet un faisceau laser à impulsions ; des amplificateurs qui sont positionnés sur le trajet de faisceau du faisceau laser à impulsions et qui amplifient le faisceau laser à impulsions ; et des filtres à longueurs d'onde qui sont positionnés sur le trajet de faisceau du faisceau laser à impulsions entre l'oscillateur maître et les amplificateurs, qui transmettent le faisceau laser à impulsions, et qui suppriment la transmission de lumière de longueurs d'onde autres que la longueur d'onde du faisceau laser à impulsions.
(JA)
 パルスレーザ光を出射するマスターオシレータと、前記パルスレーザ光の光路上に配置された前記パルスレーザ光を増幅する増幅器と、前記パルスレーザ光の光路上における前記マスターオシレータと前記増幅器との間に配置され、前記パルスレーザ光を透過し、前記パルスレーザ光の波長を除く波長の光の透過を抑制する波長フィルタと、を備えてもよい。
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