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1. WO2009044526 - 基板保持機構、基板受渡機構、及び基板処理装置

公開番号 WO/2009/044526
公開日 09.04.2009
国際出願番号 PCT/JP2008/002707
国際出願日 29.09.2008
IPC
B65G 49/06 2006.01
B処理操作;運輸
65運搬;包装;貯蔵;薄板状または線条材料の取扱い
G運搬または貯蔵装置,例.荷積みまたは荷あげ用コンベヤ;作業場コンベヤシステムまたは気体式チューブコンベヤ
49他の分類に属せず,特殊な目的に適用されることを特徴とする移送装置
05もろい,または損傷性材料または物品用のもの
06もろい薄板状材料,例.ガラス板,用のもの
H01L 21/677 2006.01
H電気
01基本的電気素子
L半導体装置,他に属さない電気的固体装置
21半導体装置または固体装置またはそれらの部品の製造または処理に特に適用される方法または装置
67製造または処理中の半導体または電気的固体装置の取扱いに特に適用される装置;半導体または電気的固体装置もしくは構成部品の製造または処理中のウエハの取扱いに特に適用される装置
677移送のためのもの,例.異なるワ―クステーション間での移送
CPC
B65G 2249/02
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
2249Aspects relating to conveying systems for the manufacture of fragile sheets
02Controlled or contamination-free environments or clean space conditions
B65G 49/063
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
49Conveying systems characterised by their application for specified purposes not otherwise provided for
05for fragile or damageable materials or articles
06for fragile sheets, e.g. glass
063Transporting devices for sheet glass
B65G 49/064
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
49Conveying systems characterised by their application for specified purposes not otherwise provided for
05for fragile or damageable materials or articles
06for fragile sheets, e.g. glass
063Transporting devices for sheet glass
064in a horizontal position
B65G 49/067
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
49Conveying systems characterised by their application for specified purposes not otherwise provided for
05for fragile or damageable materials or articles
06for fragile sheets, e.g. glass
067Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
H01L 21/67236
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
67005Apparatus not specifically provided for elsewhere
67011Apparatus for manufacture or treatment
67155Apparatus for manufacturing or treating in a plurality of work-stations
67236the substrates being processed being not semiconductor wafers, e.g. leadframes or chips
H01L 21/67706
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
677for conveying, e.g. between different workstations
67703between different workstations
67706Mechanical details, e.g. roller, belt
出願人
  • 株式会社エバテック EVATECH Co., Ltd. [JP]/[JP] (AllExceptUS)
  • 石原伸一郎 ISHIHARA, Shinichiro [JP]/[JP] (UsOnly)
  • 芦田肇 ASHIDA, Hajime [JP]/[JP] (UsOnly)
  • 渡邉亮 WATANABE, Akira [JP]/[JP] (UsOnly)
発明者
  • 石原伸一郎 ISHIHARA, Shinichiro
  • 芦田肇 ASHIDA, Hajime
  • 渡邉亮 WATANABE, Akira
代理人
  • 小林良平 KOBAYASI, Ryohei
優先権情報
2007-26254505.10.2007JP
公開言語 (言語コード) 日本語 (JA)
出願言語 (言語コード) 日本語 (JA)
指定国 (国コード)
発明の名称
(EN) SUBSTRATE HOLDING MECHANISM, SUBSTRATE DELIVERY/RECEPTION MECHANISM, AND SUBSTRATE PROCESSING DEVICE
(FR) MÉCANISME DE RETENUE DE SUBSTRAT, MÉCANISME D'APPORT/RÉCEPTION DE SUBSTRAT ET DISPOSITIF DE TRAITEMENT DE SUBSTRAT
(JA) 基板保持機構、基板受渡機構、及び基板処理装置
要約
(EN)
A substrate holding mechanism capable of reliably performing delivery and reception of a substrate. The substrate holding mechanism has a substrate holding section for holding a rectangular substrate (W), substrate holding rollers (120) arranged at those positions on the substrate holding section which correspond to two facing sides of the substrate (W) and rotatably supported by the substrate holding section, and roller drive means for rotationally driving the substrate holding rollers (120). Each substrate holding roller (120) has a circular tube section (121) and holding flanges (123a, b) each located at a portion of the outer periphery of each of opposite end surfaces of the circular tube section (121). When the substrate holding rollers (120) are rotated by the roller drive means, holding of edges of the substrate (W) by and release of the holding by the substrate holding flanges (123a, b) can be switched between each other according to the angle of the rotation of the substrate holding rollers (120).
(FR)
L'invention concerne un mécanisme de retenue de substrat permettant d'assurer de manière fiable l'apport et la réception d'un substrat. Ce mécanisme comporte une partie retenue de substrat permettant de retenir un substrat rectangulaire (W), des galets de retenue (120) de substrat qui sont placés sur la partie retenue de substrat en des points qui correspondent à deux faces du substrat (W) et maintenus rotatifs par la partie retenue de substrat, et des moyens d'entraînement des galets pour entraîner en rotation lesdits galets (120). Chaque galet de retenue (120) de substrat comporte une partie tube (121) circulaire et des bords de retenue (123a, b) placés chacun sur une partie du pourtour extérieur de chacune des surfaces d'extrémité opposées de la partie tube (121) circulaire. Quand lesdits galets (120) sont entraînés en rotation par les moyens d'entraînement de galets, les bords du substrat (W) peuvent être soit retenus, soit libérés par les bords de retenue (123a, b) de substrat selon l'angle de rotation des galets de retenue (120) de substrat.
(JA)
 基板の確実な保持及び受け渡しを行うことのできる基板保持機構を提供する。 矩形基板(W)を保持するための基板保持部を備えた基板保持機構であって、基板(W)の対向する2辺に対応した基板保持部上の位置に配設され、該基板保持部に回動可能に軸支された複数の基板保持ローラ(120)と、該基板保持ローラ(120)を回転駆動するローラ駆動手段とを備え、前記基板保持ローラ(120)が、円筒部(121)とその両端面の外周の一部に設けられた保持フランジ(123a,b)とを有し、前記ローラ駆動手段によって各基板保持ローラ(120)を回動させることにより、その回動角度に応じて前記保持フランジ(123a,b)による基板(W)の端縁の保持及び保持解除を切り換え可能な構成とする。
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