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内容
連絡先のメール アドレス
出願の表示
出願の ID/番号
1. WO2007004473 - ＩＺＯスパッタリングターゲットの製造方法
PCT 書誌情報
明細書
請求の範囲
国内段階
パテント ファミリー
更新情報
書類
パーマリンク
自動翻訳
WIPO Translate
英語
フランス語
ドイツ語
スペイン語
ロシア語
韓国語
日本語
中国語
アラビア語
ポルトガル語
イタリア語
フィンランド語
公開番号
WO/2007/004473
公開日
11.01.2007
国際出願番号
PCT/JP2006/312825
国際出願日
27.06.2006
IPC
C04B 35/00
2006.1
C
化学;冶金
04
セメント;コンクリート;人造石;セラミックス;耐火物
B
石灰;マグネシア;スラグ;セメント;その組成物,例.モルタル,コンクリートまたは類似の建築材料;人造石;セラミックス;耐火物;天然石の処理
35
組成に特徴を持つ成形セラミック製品;セラミック組成;セラミック製品を製造するための無機化合物粉末の処理
C23C 14/34
2006.1
C
化学;冶金
23
金属質材料への被覆;金属質材料による材料への被覆;化学的表面処理;金属質材料の拡散処理;真空蒸着,スパッタリング,イオン注入法,または化学蒸着による被覆一般;金属質材料の防食または鉱皮の抑制一般
C
金属質への被覆;金属材料による材料への被覆;表面への拡散,化学的変換または置換による,金属材料の表面処理;真空蒸着,スパッタリング,イオン注入法または化学蒸着による被覆一般
14
被覆形成材料の真空蒸着,スパッタリングまたはイオン注入法による被覆
22
被覆の方法に特徴のあるもの
34
スパッタリング
C04B 35/00
2006.1
C
化学;冶金
04
セメント;コンクリート;人造石;セラミックス;耐火物
B
石灰;マグネシア;スラグ;セメント;その組成物,例.モルタル,コンクリートまたは類似の建築材料;人造石;セラミックス;耐火物;天然石の処理
35
組成に特徴を持つ成形セラミック製品;セラミック組成;セラミック製品を製造するための無機化合物粉末の処理
C23C 14/34
2006.1
C
化学;冶金
23
金属質材料への被覆;金属質材料による材料への被覆;化学的表面処理;金属質材料の拡散処理;真空蒸着,スパッタリング,イオン注入法,または化学蒸着による被覆一般;金属質材料の防食または鉱皮の抑制一般
C
金属質への被覆;金属材料による材料への被覆;表面への拡散,化学的変換または置換による,金属材料の表面処理;真空蒸着,スパッタリング,イオン注入法または化学蒸着による被覆一般
14
被覆形成材料の真空蒸着,スパッタリングまたはイオン注入法による被覆
22
被覆の方法に特徴のあるもの
34
スパッタリング
分類の表示データを減らす
CPC
B82Y 30/00
B
PERFORMING OPERATIONS; TRANSPORTING
82
NANOTECHNOLOGY
Y
SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
30
Nanotechnology for materials or surface science, e.g. nanocomposites
C04B 2235/3286
C
CHEMISTRY; METALLURGY
04
CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
B
LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE
2235
Aspects relating to ceramic starting mixtures or sintered ceramic products
02
Composition of constituents of the starting material or of secondary phases of the final product
30
Constituents and secondary phases not being of a fibrous nature
32
Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
3286
Gallium oxides, gallates, indium oxides, indates, thallium oxides, thallates or oxide forming salts thereof, e.g. zinc gallate
C04B 2235/5409
C
CHEMISTRY; METALLURGY
04
CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
B
LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE
2235
Aspects relating to ceramic starting mixtures or sintered ceramic products
02
Composition of constituents of the starting material or of secondary phases of the final product
50
Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
54
Particle size related information
5409
expressed by specific surface values
C04B 2235/5436
C
CHEMISTRY; METALLURGY
04
CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
B
LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE
2235
Aspects relating to ceramic starting mixtures or sintered ceramic products
02
Composition of constituents of the starting material or of secondary phases of the final product
50
Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
54
Particle size related information
5418
expressed by the size of the particles or aggregates thereof
5436
micrometer sized, i.e. from 1 to 100 micron
C04B 2235/5445
C
CHEMISTRY; METALLURGY
04
CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
B
LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE
2235
Aspects relating to ceramic starting mixtures or sintered ceramic products
02
Composition of constituents of the starting material or of secondary phases of the final product
50
Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
54
Particle size related information
5418
expressed by the size of the particles or aggregates thereof
5445
submicron sized, i.e. from 0,1 to 1 micron
C04B 2235/5454
C
CHEMISTRY; METALLURGY
04
CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
B
LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE
2235
Aspects relating to ceramic starting mixtures or sintered ceramic products
02
Composition of constituents of the starting material or of secondary phases of the final product
50
Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
54
Particle size related information
5418
expressed by the size of the particles or aggregates thereof
5454
nanometer sized, i.e. below 100 nm
分類をさらに表示
B82Y 30/00
B
PERFORMING OPERATIONS; TRANSPORTING
82
NANOTECHNOLOGY
Y
SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
30
Nanotechnology for materials or surface science, e.g. nanocomposites
C04B 2235/3286
C
CHEMISTRY; METALLURGY
04
CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
B
LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE
2235
Aspects relating to ceramic starting mixtures or sintered ceramic products
02
Composition of constituents of the starting material or of secondary phases of the final product
30
Constituents and secondary phases not being of a fibrous nature
32
Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
3286
Gallium oxides, gallates, indium oxides, indates, thallium oxides, thallates or oxide forming salts thereof, e.g. zinc gallate
C04B 2235/5409
C
CHEMISTRY; METALLURGY
04
CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
B
LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE
2235
Aspects relating to ceramic starting mixtures or sintered ceramic products
02
Composition of constituents of the starting material or of secondary phases of the final product
50
Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
54
Particle size related information
5409
expressed by specific surface values
C04B 2235/5436
C
CHEMISTRY; METALLURGY
04
CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
B
LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE
2235
Aspects relating to ceramic starting mixtures or sintered ceramic products
02
Composition of constituents of the starting material or of secondary phases of the final product
50
Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
54
Particle size related information
5418
expressed by the size of the particles or aggregates thereof
5436
micrometer sized, i.e. from 1 to 100 micron
C04B 2235/5445
C
CHEMISTRY; METALLURGY
04
CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
B
LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE
2235
Aspects relating to ceramic starting mixtures or sintered ceramic products
02
Composition of constituents of the starting material or of secondary phases of the final product
50
Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
54
Particle size related information
5418
expressed by the size of the particles or aggregates thereof
5445
submicron sized, i.e. from 0,1 to 1 micron
C04B 2235/5454
C
CHEMISTRY; METALLURGY
04
CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
B
LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE
2235
Aspects relating to ceramic starting mixtures or sintered ceramic products
02
Composition of constituents of the starting material or of secondary phases of the final product
50
Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
54
Particle size related information
5418
expressed by the size of the particles or aggregates thereof
5454
nanometer sized, i.e. below 100 nm
C04B 2235/604
C
CHEMISTRY; METALLURGY
04
CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
B
LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE
2235
Aspects relating to ceramic starting mixtures or sintered ceramic products
60
Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
604
Pressing at temperatures other than sintering temperatures
C04B 2235/656
C
CHEMISTRY; METALLURGY
04
CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
B
LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE
2235
Aspects relating to ceramic starting mixtures or sintered ceramic products
65
Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
656
characterised by specific heating conditions during heat treatment
C04B 2235/6585
C
CHEMISTRY; METALLURGY
04
CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
B
LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE
2235
Aspects relating to ceramic starting mixtures or sintered ceramic products
65
Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
658
Atmosphere during thermal treatment
6583
Oxygen containing atmosphere, e.g. with changing oxygen pressures
6585
at an oxygen percentage above that of air
C04B 2235/77
C
CHEMISTRY; METALLURGY
04
CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
B
LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE
2235
Aspects relating to ceramic starting mixtures or sintered ceramic products
70
Aspects relating to sintered or melt-casted ceramic products
74
Physical characteristics
77
Density
C04B 35/00
C
CHEMISTRY; METALLURGY
04
CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
B
LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE
35
Shaped ceramic products characterised by their composition
C04B 35/453
C
CHEMISTRY; METALLURGY
04
CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
B
LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE
35
Shaped ceramic products characterised by their composition
01
based on oxide ceramics
453
based on zinc, tin, or bismuth oxides or solid solutions thereof with other oxides, e.g. zincates, stannates or bismuthates
C04B 35/62655
C
CHEMISTRY; METALLURGY
04
CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
B
LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE
35
Shaped ceramic products characterised by their composition
622
Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
626
Preparing or treating the powders individually or as batches
62605
Treating the starting powders individually or as mixtures
62645
Thermal treatment of powders or mixtures thereof other than sintering
62655
Drying, e.g. freeze-drying, spray-drying, microwave or supercritical drying
C04B 35/645
C
CHEMISTRY; METALLURGY
04
CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
B
LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE
35
Shaped ceramic products characterised by their composition
622
Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
64
Burning or sintering processes
645
Pressure sintering
C23C 14/086
C
CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
06
characterised by the coating material
08
Oxides
086
of zinc, germanium, cadmium, indium, tin, thallium or bismuth
C23C 14/34
C
CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
34
Sputtering
C23C 14/3414
C
CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
34
Sputtering
3407
Cathode assembly for sputtering apparatus, e.g. Target
3414
Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
分類の表示データを減らす
出願人
出光興産株式会社 IDEMITSU KOSAN CO., LTD.
[JP]/[JP]
(AllExceptUS)
井上 一吉 INOUE, Kazuyoshi
[JP]/[JP] (UsOnly)
海上 暁 KAIJO, Akira
[JP]/[JP] (UsOnly)
松原 雅人 MATSUBARA, Masato
[JP]/[JP] (UsOnly)
発明者
井上 一吉 INOUE, Kazuyoshi
海上 暁 KAIJO, Akira
松原 雅人 MATSUBARA, Masato
代理人
大谷 保 OHTANI, Tamotsu
優先権情報
2005-193504
01.07.2005
JP
2005-193505
01.07.2005
JP
公開言語 (言語コード)
日本語 (ja)
出願言語 (言語コード)
日本語 (JA)
指定国 (国コード)
すべて表示
AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HN, HR, HU, ID, IL, IN, IS, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LV, LY, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
アフリカ広域知的所有権機関 (ARIPO) (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
ユーラシア特許庁(EAPO) (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
欧州特許庁(EPO) (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
アフリカ知的所有権機関(OAPI) (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
すべて非表示
発明の名称
(EN)
PROCESS FOR PRODUCING IZO SPUTTERING TARGET
(FR)
PROCÉDÉ DE FABRICATION D’UNE CIBLE DE PULVÉRISATION IZO
(JA)
ＩＺＯスパッタリングターゲットの製造方法
要約
(EN)
A process for IZO sputtering target production in which the number of steps can be reduced while maintaining properties required of an IZO sputtering target to thereby attain an improvement in productivity and a reduction in production cost. Also provided is the production process in which a reduced sintering temperature can be used to thereby attain an improvement in productivity and a reduction in production cost. The process for producing an IZO sputtering target is characterized by comprising: a mixing/pulverization step in which either an indium oxide powder and zinc oxide power each having specific properties or a raw powder comprising these powders as major components is mixed and pulverized to obtain a fine powder; a molding step in which the fine powder is molded to obtain a molding; and a sintering step in which the molding is sintered at 1,250-1,450°C in an oxygenous atmosphere or sintered at 1,100-1,250°C in an oxygenous atmosphere with pressurizing to thereby obtain a sinter.
(FR)
La présente invention concerne un procédé de fabrication d’une cible de pulvérisation IZO dans lequel le nombre d’étapes peut être réduit tout en conservant les propriétés requises d'une cible de pulvérisation IZO permettant ainsi d’améliorer la productivité et de réduire les coûts de fabrication. L'invention prévoit en outre un procédé de fabrication dans lequel une température de frittage réduite peut être utilisée permettant ainsi d’améliorer la productivité et de réduire les coûts de fabrication. Le procédé de fabrication de l'invention est caractérisé en ce qu'il comprend : une étape de mélange/pulvérisation dans laquelle une poudre d'oxyde d'indium et une poudre d'oxyde de zinc ayant chacune des propriétés spécifiques ou une poudre brute comprenant ces poudres comme composants principaux est mélangée et pulvérisée pour obtenir une poudre fine ; une étape de moulage dans laquelle la poudre fine est moulée pour obtenir une pièce moulée ; et une étape de frittage dans laquelle la pièce moulée est frittée à 1250-1450 °C dans une atmosphère d’oxygène ou frittée sous pression à une température de 1100 à 1250 °C dans une atmosphère d'oxygène pour obtenir ainsi un aggloméré.
(JA)
ＩＺＯスパッタリングターゲットの製造において、ＩＺＯスパッタリングターゲットとしての特性を維持しつつ、工程を削減することにより生産性の向上及び製造コストの低減が可能となる製造方法を提供する。また、焼結温度を下げることにより生産性の向上及び製造コストの低減が可能となる製造方法を提供する。 特定の性状を有する酸化インジウム粉末と酸化亜鉛粉末とを、又はこれらの粉末を主成分とする原料粉末を混合粉砕して微粉末を得る混合粉砕工程、前記微粉末を成型して成型物を得る成型工程、前記成型物を酸素雰囲気中１２５０～１４５０°Cで、又は前記成型物を加圧下、酸素雰囲気中１１００～１２５０°Cで焼結して焼結体を得る焼結工程を含むことを特徴とするＩＺＯスパッタリングターゲットの製造方法である。
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