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1. WO2007004435 - 音響共振器及びフィルタ

公開番号 WO/2007/004435
公開日 11.01.2007
国際出願番号 PCT/JP2006/312523
国際出願日 22.06.2006
IPC
H03H 9/17 2006.1
H電気
03基本電子回路
Hインビーダンス回路網,例.共振回路;共振器
9電気機械的または電気音響的素子を含む回路網;電気機械的共振器
15圧電または電わい材料からなる共振器の構造上の特徴
17単一の共振器を持つもの
H03H 9/58 2006.1
H電気
03基本電子回路
Hインビーダンス回路網,例.共振回路;共振器
9電気機械的または電気音響的素子を含む回路網;電気機械的共振器
46濾波器
54圧電または電わい材料からなる共振器を含むもの
58複数の結晶を持つ濾波器
CPC
H03H 2003/021
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
3Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
007for the manufacture of electromechanical resonators or networks
02for the manufacture of piezo-electric or electrostrictive resonators or networks
021the resonators or networks being of the air-gap type
H03H 2003/025
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
3Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
007for the manufacture of electromechanical resonators or networks
02for the manufacture of piezo-electric or electrostrictive resonators or networks
025the resonators or networks comprising an acoustic mirror
H03H 3/02
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
3Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
007for the manufacture of electromechanical resonators or networks
02for the manufacture of piezo-electric or electrostrictive resonators or networks
H03H 9/0211
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
9Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
02Details
02007of bulk acoustic wave devices
02086Means for compensation or elimination of undesirable effects
0211of reflections
H03H 9/173
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
9Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
15Constructional features of resonators consisting of piezo-electric or electrostrictive material
17having a single resonator
171implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
172Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
173Air-gaps
H03H 9/175
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
9Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
15Constructional features of resonators consisting of piezo-electric or electrostrictive material
17having a single resonator
171implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
172Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
175Acoustic mirrors
出願人
  • 松下電器産業株式会社 MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. [JP]/[JP] (AllExceptUS)
  • 中塚 宏 NAKATSUKA, Hiroshi (UsOnly)
  • 大西 慶治 ONISHI, Keiji (UsOnly)
  • 中村 弘幸 NAKAMURA, Hiroyuki (UsOnly)
  • 岩崎 智弘 IWASAKI, Tomohiro (UsOnly)
  • 鶴見 直大 TSURUMI, Naohiro (UsOnly)
発明者
  • 中塚 宏 NAKATSUKA, Hiroshi
  • 大西 慶治 ONISHI, Keiji
  • 中村 弘幸 NAKAMURA, Hiroyuki
  • 岩崎 智弘 IWASAKI, Tomohiro
  • 鶴見 直大 TSURUMI, Naohiro
代理人
  • 小笠原 史朗 OGASAWARA, Shiro
優先権情報
2005-19251630.06.2005JP
2005-24657226.08.2005JP
公開言語 (言語コード) 日本語 (ja)
出願言語 (言語コード) 日本語 (JA)
指定国 (国コード)
発明の名称
(EN) ACOUSTIC RESONATOR AND FILTER
(FR) RÉSONATEUR ACOUSTIQUE ET FILTRE
(JA) 音響共振器及びフィルタ
要約
(EN) A first supporting section (30) is provided between a substrate section (40) and a second supporting section (20). The first supporting section (30) is composed of a film formed of a material having an acoustic impedance higher than those of a piezoelectric body (11) and the substrate section (40), or a film formed of a material having a Q value smaller than those of the piezoelectric body (11) and the substrate section (40). Due to insertion of the first supporting section (30), almost all the vibrations from the second supporting section (20) to the substrate section (40) are reflected (arrow (a)), and the vibrations transmitted from the second supporting section (20) to the substrate section (40) are reflected at a bottom plane of the supporting section (40) and are prevented from returning into the direction of a vibration section (10) (arrow (b)).
(FR) L’invention concerne un résonateur acoustique et un filtre, dans lesquels une première section support (30) est disposée entre une section substrat (40) et une seconde section support (20). La première section support (30) est composée d’un film formé d’un matériau ayant une impédance acoustique supérieure à celles d’un corps piézoélectrique (11) et de la section substrat (40), ou d’un film formé d’un matériau ayant une valeur Q inférieure à celles du corps piézoélectrique (11) et de la section substrat (40). En raison de l’insertion de la première section support (30), presque toutes les vibrations de la seconde section support (20) vers la section substrat (40) sont réfléchies (flèche (a)) et les vibrations transmises de la seconde section support (20) vers la section substrat (40) sont réfléchies au niveau d’un plan inférieur de la section support (40) et leur retour dans la direction de la section de vibration (10) (flèche (b)) est empêché.
(JA)  基板部40と第2の支持部20との間に、第1の支持部30を設ける。この第1の支持部30は、圧電体11及び基板部40よりも高い音響インピーダンスを有する材料で形成された膜、又は圧電体11及び基板部40よりもQ値が小さい材料で形成された膜等で構成される。この第1の支持部30の挿入によって、第2の支持部20から基板部40へ向かう振動の大半が反射され(矢印a)、また第2の支持部20から基板部40へ伝わった振動が基板部40の底面で反射して振動部10の方向へ戻ってくることが防げる(矢印b)。
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