国際・国内特許データベース検索

1. (WO2004057667) METHOD FOR RE-ROUTING LITHOGRAPHY-FREE MICROELECTRONIC DEVICES

Pub. No.:    WO/2004/057667    International Application No.:    PCT/FR2003/050188
Publication Date: Fri Jul 09 01:59:59 CEST 2004 International Filing Date: Thu Dec 18 00:59:59 CET 2003
IPC: H01L 21/60
H01L 21/768
H01L 23/31
H01L 23/485
Applicants: COMMISSARIAT A L'ENERGIE ATOMIQUE
BALERAS, François
DELAGUILLAUMIE, Fanny
ZUSSY, Marc
Inventors: BALERAS, François
DELAGUILLAUMIE, Fanny
ZUSSY, Marc
Title: METHOD FOR RE-ROUTING LITHOGRAPHY-FREE MICROELECTRONIC DEVICES
Abstract:
The invention concerns a method for making a wafer level electronic chip scale package, the wafer comprising at least one chip and said at least one chip including input/output contact pads on one surface of the wafer called front side, the method comprising the following steps: a) forming, by means of a mold or a complex stencil, an insulating stress-relaxing layer on said front surface, said relaxation layer covering the wafer front surface with a raised part including access wells at the input/output contact pads, and elsewhere, projecting parts designed to relax the stresses, each projecting part having a stepped shape comprising at least one prominent zone and at least one zone, recessed relative to said prominent zone, designed to support an electrical bond pad; b) forming electrically conductive tracks on the relaxation layer to connect the input/output contact pads to the corresponding electrical bond pads. The invention also concerns a mould or complex stencil for making a chip scale package using said inventive method as well as the resulting package itself.