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出願の表示

1. US20090177308 - SERVER AND PROGRAM

官庁 アメリカ合衆国
出願番号 12300015
出願日 24.04.2007
公開番号 20090177308
公開日 09.07.2009
特許番号 08355808
特許付与日 15.01.2013
公報種別 B2
IPC
G06F 17/00
G物理学
06計算;計数
F電気的デジタルデータ処理
17特定の機能に特に適合したデジタル計算またはデータ処理の装置または方法
出願人 TOKYO ELECTRON LIMITED
発明者 Inokawa Takumi
Koyama Noriaki
代理人 PEARNE &; GORDON LLP
優先権情報 2006129729 09.05.2006 JP
発明の名称
(EN) SERVER AND PROGRAM
要約
(EN)

It is possible to compose a chart by filtering measurement information using a product wafer number in a server device including: an instruction receiving unit for storing therein plural measurement information, which is time sequential information measured in a plurality of manufacturing apparatuses and has a product wafer number and time information, and for receiving an output instruction of a chart containing the product wafer number; a fault detection unit for, when the instruction receiving unit receives the output instruction, reading a multiplicity of measurement information satisfying a product wafer number condition contained in the output instruction, and determining whether the read multiplicity of measurement information satisfies the condition information; an output information composing unit for composing the output information according to a determination result of the fault detection unit; and an output unit for outputting the output information composed by the output information composing unit.