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1. US20070180672 - Resonant-oscillating-device fabrication method

官庁 アメリカ合衆国
出願番号 11727840
出願日 28.03.2007
公開番号 20070180672
公開日 09.08.2007
特許番号 7793404
特許付与日 14.09.2010
公報種別 B2
IPC
H 電気
04
電気通信技術
R
スピーカ,マイクロホン,蓄音機ピックアップまたは類似の音響電気機械変換器;補聴器;パブリックアドレスシステム
31
変換器またはそのための振動板の製造に特に適合した装置または方法
CPC
H03H 9/02259
G02B 26/0858
H03H 3/0077
H03H 9/2494
H03H 2009/02519
Y10T 29/42
出願人 Brother Kogyo Kabushiki Kaisha
発明者 Murakami Kenichi
Asai Nobuaki
代理人 Oliff &; Berridge, PLC
発明の名称
(EN) Resonant-oscillating-device fabrication method
要約
(EN)

A resonant-oscillating-device fabrication method for integrally forming a structure comprising a support, a beam vibratably extending from the support, and an oscillating element which is supported by the beam so as to oscillate in resonance with the vibration of the beam at a desired resonant frequency, by using a substrate. The resonant-oscillating-device fabrication method having a thickness measurement step of measuring the thickness of the substrate, an etching condition determination step of determining conditions of etching a portion forming the beam in the substrate to provide the desired resonant frequency, in accordance with the thickness of the substrate measured in the thickness measurement step, and an etching step of etching the substrate in accordance with the etching conditions.

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