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1. TH1701005286A - THREE-DIMENSIONAL MEASUREMENT DEVICE

官庁
タイ
出願番号 1701005286
出願日 08.01.2016
公開番号 1701005286A
公開日 28.06.2019
公報種別 A
IPC
G01B 11/25
G物理学
01測定;試験
B長さ,厚さまたは同種の直線寸法の測定;角度の測定;面積の測定;表面または輪郭の不規則性の測定
11光学的手段の使用によって特徴づけられた測定装置
24輪郭または曲率の測定用
25対象物にパターン,例.モアレ縞,を投影することによるもの
出願人 ซีเคดี คอร์ปอเรชั่น
発明者 ซาคาอิดะ โนริฮิโกะ
มามิยะ ทาคาฮิโระ
โอยามะ ซึโยชิ
อิชิงากิ ฮิโรยูกิ
代理人 นางดารานีย์ วัจนะวุฒิวงศ์, นางสาวสนธยา สังขพงศ์
優先権情報 PCT/JP2016/050551 08.01.2016 -
2015118842 12.06.2015 JP
発明の名称
(EN) THREE-DIMENSIONAL MEASUREMENT DEVICE
(TH) ชุดเครื่องตรวจวัดแบบสามมิติ
要約
(EN) The present invention provides a three-dimensional measurement device capable of carrying out three-dimensional measurement using a phase shift method with higher accuracy and in a shorter period of time. A substrate inspection device 1 is provided with an illumination device 4 for irradiating a striped light pattern onto a printed circuit board 2, a camera 5 for imaging the portion of the printed circuit board 2 irradiated with the light pattern, and a control device 6 for carrying out three-dimensional measurement on the basis of the imaged image data. The control device 6 calculates a first height measurement value on the basis of image data obtained by irradiating a first optical pattern having a first period onto a first position and acquires gain and offset values from the image data. Further, the control device 6 uses the gain and offset values to calculate a second height measurement value on the basis of image data obtained by irradiating a second optical pattern having a second period onto a second position that is diagonally offset by a half-pixel pitch. Height data specified on the basis of the first measurement value and second measurement value is acquired as real height data.