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1. JPWO2020196195 - 状態判定装置、状態判定方法及びコンピュータ読み取り可能な記録媒体

パーマリンク
官庁
日本
出願番号 2021509271
出願日 18.03.2020
公開番号 WO2020196195
公開日 01.10.2020
公報種別 A
CPC
H01L 21/677
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
677for conveying, e.g. between different workstations
G05B 23/02
GPHYSICS
05CONTROLLING; REGULATING
BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
23Testing or monitoring of control systems or parts thereof
02Electric testing or monitoring
G01L 5/00
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
5Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
G05B 19/4155
GPHYSICS
05CONTROLLING; REGULATING
BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
19Programme-control systems
02electric
18Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
4155characterised by programme execution, i.e. part programme or machine function execution, e.g. selection of a programme
G05B 2219/45031
GPHYSICS
05CONTROLLING; REGULATING
BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
2219Program-control systems
30Nc systems
45Nc applications
45031Manufacturing semiconductor wafers
H01L 21/67276
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
67005Apparatus not specifically provided for elsewhere
67242Apparatus for monitoring, sorting or marking
67276Production flow monitoring, e.g. for increasing throughput
出願人 東京エレクトロン株式会社
発明者 牧　準之輔
豊永　真臣
太田　敦
岡田　基
筒井　拓郎
佐野　圭
矢野　光輝
代理人 長谷川　芳樹
黒木　義樹
柏岡　潤二
松尾　茂樹
中村　真生
優先権情報 2019058391 26.03.2019 JP
発明の名称
(JA) 状態判定装置、状態判定方法及びコンピュータ読み取り可能な記録媒体
関連特許文献
WO/2020/196195
CN113614664
KR1020210145769
US20220223443
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