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1. JP2021007095 - 光電陰極、電子管、及び、光電陰極の製造方法

官庁
日本
出願番号 2020104501
出願日 17.06.2020
公開番号 2021007095
公開日 21.01.2021
公報種別 A
CPC
H01J 1/34
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
1Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
02Main electrodes
34Photo-emissive cathodes
H01J 9/12
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
9Apparatus or processes specially adapted for the manufacture ; , installation, removal, maintenance; of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
02Manufacture of electrodes or electrode systems
12of photo-emissive cathodes; of secondary-emission electrodes
H01J 40/06
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
40Photoelectric discharge tubes not involving the ionisation of a gas
02Details
04Electrodes
06Photo-emissive cathodes
H01J 43/24
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
43Secondary-emission tubes; Electron-multiplier tubes
04Electron multipliers
06Electrode arrangements
18Electrode arrangements using essentially more than one dynode
24Dynodes having potential gradient along their surfaces
出願人 HAMAMATSU PHOTONICS KK
浜松ホトニクス株式会社
発明者 KAWAI TERUNORI
河合 輝典
TORII YOSHITAKA
鳥居 良崇
SHIBAYAMA MASAMI
柴山 正巳
WATANABE HIROYUKI
渡辺 宏之
YAMASHITA SHINICHI
山下 真一
代理人 長谷川 芳樹
黒木 義樹
柴山 健一
優先権情報 2019118249 26.06.2019 JP
2019126375 05.07.2019 JP
発明の名称
(EN) PHOTOCATHODE, ELECTRON TUBE, AND METHOD FOR MANUFACTURING PHOTOCATHODE
(JA) 光電陰極、電子管、及び、光電陰極の製造方法
要約
(EN)

PROBLEM TO BE SOLVED: To provide a photocathode, an electron tube, and a method for manufacturing the photocathode, capable of improving productivity.

SOLUTION: A photocathode 1 includes: a substrate 100; a photoelectric conversion layer 300 which is provided over the substrate 100 and generates a photoelectron in response to the incidence of light; and a ground layer 200 which is provided between the substrate 100 and the photoelectric conversion layer 300 and contains a nitride of beryllium and an oxide of beryllium. The method for manufacturing the photocathode 1 includes: a first step of preparing the substrate 100; a second step of forming, on the substrate 100, the ground layer 200 that contains a nitride of beryllium and an oxide of beryllium; and a third step of forming, on the ground layer 200, the photoelectric conversion layer 300 generating a photoelectron in response to the incidence of light.

SELECTED DRAWING: Figure 2

COPYRIGHT: (C)2021,JPO&INPIT


(JA)

【課題】生産性を向上可能な光電陰極、電子管、及び、光電陰極の製造方法を提供する。
【解決手段】光電陰極1は、基板100と、基板100上に設けられ、光の入射に応じて光電子を発生させる光電変換層300と、基板100と光電変換層300との間に設けられ、ベリリウムの窒化物及びベリリウムの酸化物を含む下地層200と、を備える。光電陰極1の製造方法は、基板100を用意する第1工程と、基板100上にベリリウムの窒化物及びベリリウムの酸化物を含む下地層200を形成する第2工程と、下地層200上に、光の入射に応じて光電子を発生させる光電変換層300を形成する第3工程と、を備える。
【選択図】図2


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