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PROBLEM TO BE SOLVED: To enhance accuracy in measurement of the number of fine particles in water to be treated.
SOLUTION: At a downstream side of a flow direction of ultrapure water than a fine particle measuring device 17 with respect to a fine particle measurement system 3 in which the fine particle measuring device 17 is disposed at measuring piping 15 through which ultrapure water (a sample of water to be treated) flows, the fine particle measurement system 3 is cleaned by setting flow quantity of the ultrapure water to first cleaning flow quantity larger than flow quantity for measuring the number of fine particles.
SELECTED DRAWING: Figure 2
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【課題】被処理水中の微粒子数の測定における正確性を高める。【解決手段】超純水(被処理水の一例)が流れる測定用配管15に微粒子測定装置17が設けられた微粒子測定システム3に対し、微粒子測定装置17よりも超純水の流れ方向の下流側で、超純水の流量を、微粒子数の測定用流量よりも多い第一洗浄用流量として微粒子測定システム3を洗浄する。【選択図】図2